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Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:cond-mat/9909271 (cond-mat)
[Submitted on 17 Sep 1999]

Title:Thermoelastic Damping in Micro- and Nano-Mechanical Systems

Authors:Ron Lifshitz, M. L. Roukes
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Abstract: The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS and NEMS). The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.
Comments: 10 pages. Submitted to Phys. Rev. B
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:cond-mat/9909271 [cond-mat.mes-hall]
  (or arXiv:cond-mat/9909271v1 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.cond-mat/9909271
Journal reference: Phys. Rev. B 61, 5600 (2000).
Related DOI: https://doi.org/10.1103/PhysRevB.61.5600

Submission history

From: Ron Lifshitz [view email]
[v1] Fri, 17 Sep 1999 23:52:16 UTC (93 KB)
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