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Physics > Optics

arXiv:2510.14238 (physics)
[Submitted on 16 Oct 2025]

Title:Wide-Field Reflective Imaging with an Epi-Illumination Multi-Camera Array Microscope

Authors:Xiangjiang Bao, Lucas Kreiss, Clare B. Cook, Haoyu Gong, Mark Harfouche, Roarke Horstmeyer
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Abstract:We present an epi-illumination multi-camera array microscope (epi-MCAM) designed for wide-field reflective imaging of non-transparent samples. The epi-MCAM contains 24 tightly packed and synchronized epi-illumination microscope units, arranged in a $4 \times 6$ planar array at 18 mm spacing. Each unit contains a unique CMOS image sensor (13 megapixels each), an objective and tube lens pair, and a beamsplitter and epi-illumination light path. An epi-MCAM capture cycle produces a stitched image covering $72 \times 108~\mathrm{mm}^2$ at a micrometer scale resolution down to 2.46 $\mu$m. To image samples exceeding this native field of view, we translate the entire array across the sample surface to enable high-resolution coverage of large objects. We demonstrate the system's ability to image both flat and three-dimensionally structured reflective samples, such as semiconductor wafers and printed circuit boards, which highlight the epi-MCAM's strong potential within industrial inspection applications.
Comments: 13 pages, 5 figures
Subjects: Optics (physics.optics)
Cite as: arXiv:2510.14238 [physics.optics]
  (or arXiv:2510.14238v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.2510.14238

Submission history

From: Xiangjiang Bao [view email]
[v1] Thu, 16 Oct 2025 02:47:00 UTC (9,482 KB)
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