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Condensed Matter > Materials Science

arXiv:2503.08399 (cond-mat)
[Submitted on 11 Mar 2025]

Title:The effect of boron incorporation on leakage and wake-up in ferroelectric Al_{1-x}Sc_xN

Authors:Maike Gremmel (1), Chandrashekhar Prakash Savant (2), Debaditya Bhattacharya (3), Georg Schönweger (1, 4), Debdeep Jena (2, 3, 5), Simon Fichtner (1, 4) ((1) Institute of Material Science, Kiel University, Germany (2) Department of Materials Science and Engineering, Cornell University, United States (3) School of Electrical and Computer Engineering, Cornell University, United States (4) Fraunhofer Institute for Silicon Technology (ISIT), Germany (5) Kavli Institute at Cornell for Nanoscale Science, Cornell University, United States)
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Abstract:This study explores the influence of boron incorporation on the structural and electrical properties of ferroelectric Aluminum Scandium Nitride (Al_{1-x}Sc_xN ) thin films, focusing on leakage currents, wake-up effects, and imprint behavior. Al_{1-x}Sc_xN films were incorporated with varying boron concentrations and analyzed under different deposition conditions to determine their structural integrity and ferroelectric performance. Key findings include a reduction in leakage currents, non-trivial alterations in bandgap energy as well as an increasing coercive fields with increasing boron content. Films with 6-13 at.% boron exhibited N-polar growth, while those with 16 at.% boron showed mixed polarity after deposition, which affected their ferroelectric response during the initial switching cycles - as did the addition of boron itself compared to pure Al1-xScxN . With increasing boron content, wake-up became gradually more pronounced and was strongest for pure Al_{1-x}B_xN .
Comments: 8 pages, 7 figure, submitted to "Journal of Applied Physics"
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2503.08399 [cond-mat.mtrl-sci]
  (or arXiv:2503.08399v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.2503.08399

Submission history

From: Maike Gremmel [view email]
[v1] Tue, 11 Mar 2025 13:04:07 UTC (45,714 KB)
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