Title:Coherent Superconductor-Semiconductor Epitaxy for Integrated Quantum Electronics

Abstract:Introducing superconductivity into group IV elements by doping has long promised a pathway to introduce quantum functionalities into well-established semiconductor technologies. The non-equilibrium hyperdoping of group III atoms into Si or Ge has successfully shown superconductivity can be achieved, however, the origin of superconductivity has been obscured by structural disorder and dopant clustering. Here, we report the epitaxial growth of hyperdoped Ga:Ge films by molecular beam epitaxy with extreme hole concentrations ($n_\textup{h} = 4.15 \times 10^{21}$~cm$^{-3}$, ~17.9\% Ga substitution) that yield superconductivity with a critical temperature of $T_{\textup{c}} = 3.5$~K and an out-of-plane critical field of 1~T at 270~mK. Synchrotron-based X-ray absorption and scattering methods reveal that Ga dopants are substitutionally incorporated within the Ge lattice, introducing a tetragonal distortion to the crystal unit cell. Our findings, corroborated by first-principles calculations, suggest that the structural order of Ga dopants creates a narrow band for the emergence of superconductivity in Ge, establishing hyperdoped Ga:Ge as a low-disorder, epitaxial superconductor-semiconductor platform.