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Condensed Matter > Materials Science

arXiv:2409.00200 (cond-mat)
[Submitted on 30 Aug 2024]

Title:Measurements of dislocations in 4H-SiC with rocking curve imaging

Authors:Ahmar Khaliq, Felix Wittwer, Niklas Pyrlik, Giovanni Fevola, Svenja Patjens, Jackson Barp, Gero Falkenberg, Sven Hampel, Michael Stuckelberger, Jan Garrevoet, Dennis Bruckner, Peter Modregger
View a PDF of the paper titled Measurements of dislocations in 4H-SiC with rocking curve imaging, by Ahmar Khaliq and 10 other authors
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Abstract:4H Silicon Carbide (4H-SiC) combines many attractive properties such as a high carrier mobility, a wide bandgap, and a high thermal conductivity, making it an ideal candidate for high-power electronic devices. However, a primary challenge in utilizing 4H-SiC is the presence of defects in epitaxial layers, which can significantly degrade device performance. In this study, we have used X-ray transmission topography with a rocking curve imaging technique to characterize the types and distribution of defects in 4H-SiC. The derived maps from the fitted Gaussian parameters were used to investigate dislocations in 4H-SiC. Understanding the distribution of the dislocations provides valuable insights into the overall crystal quality, which can guide improvements for the fabrication processes.
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2409.00200 [cond-mat.mtrl-sci]
  (or arXiv:2409.00200v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.2409.00200
arXiv-issued DOI via DataCite

Submission history

From: Peter Modregger [view email]
[v1] Fri, 30 Aug 2024 18:27:13 UTC (15,512 KB)
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