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Condensed Matter > Superconductivity

arXiv:2406.11329 (cond-mat)
[Submitted on 17 Jun 2024]

Title:Molybdenum low resistance thin film resistors for cryogenic devices

Authors:Yu P Korneeva, M A Dryazgov, N V Porokhov, N N Osipov, M I Krasilnikov, A A Korneev, M. A. Tarkhov
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Abstract:We present a study of thin-film molybdenum resistors for NbN electronics operating at cryogenic temperatures. The key step is the 0.5-1.5 keV ion cleaning-activation of NbN before Mo deposition which allows to obtain a high-quality Mo/NbN interface which together with additional aluminum bandage layer in the area of contact pads allow to reduce contact resistance below 1 Ohm. The quality of the interfaces is confirmed by transmission electron microscopy and X-ray reflectometry.
Subjects: Superconductivity (cond-mat.supr-con)
Cite as: arXiv:2406.11329 [cond-mat.supr-con]
  (or arXiv:2406.11329v1 [cond-mat.supr-con] for this version)
  https://doi.org/10.48550/arXiv.2406.11329

Submission history

From: Yuliya Korneeva [view email]
[v1] Mon, 17 Jun 2024 08:41:34 UTC (750 KB)
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