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Physics > Instrumentation and Detectors

arXiv:2401.01006 (physics)
[Submitted on 15 Nov 2023]

Title:Design of a full-filed transmission X-ray microscope with 30nm resolution

Authors:Keliang Liao, Qili He, Panyun Li, Maohua Song, Peiping Zhu
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Abstract:A full-field transmission hard X-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXM was introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.
Subjects: Instrumentation and Detectors (physics.ins-det); Optics (physics.optics)
Cite as: arXiv:2401.01006 [physics.ins-det]
  (or arXiv:2401.01006v1 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.2401.01006

Submission history

From: Keliang Liao [view email]
[v1] Wed, 15 Nov 2023 11:35:20 UTC (1,699 KB)
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