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Electrical Engineering and Systems Science > Systems and Control

arXiv:2310.15403 (eess)
[Submitted on 23 Oct 2023 (v1), last revised 26 Oct 2023 (this version, v2)]

Title:A Comparative Study between Silicon Carbide and Silicon Nitride based Single Cell CMUT

Authors:Rakesh Kanjilal, Reshmi Maity
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Abstract:This research explores the design and conducts a comparative analysis of a noninsulated Capacitive Micromachined Ultrasonic Transducer (CMUT) featuring an innovative asymmetric electrode configuration to improve the performance of the device. Specifically, this configuration involves the utilization of a top electrode with a smaller radius in comparison to the bottom electrode. The study encompasses an investigation into the effects of varying biasing voltage within the range of 40 V to 100 V. The materials employed in this study are carefully selected to optimize the CMUT's performance. The substrate material is silicon, and the bottom and top electrodes are made from aluminium. Additionally, silicon dioxide is utilized as the foundation material within the device's structure.
Comments: copyright (2023) Inventive Research Organization. This is an open access article under the Creative Commons Attribution-NonCommercial International (CC BY-NC 4.0) License. This is a "Preprint" version of the main publication, published copy of the article can be accessed from the publisher's directory (DOI: https://doi.org/10.36548/jei.2023.3.006)
Subjects: Systems and Control (eess.SY)
Cite as: arXiv:2310.15403 [eess.SY]
  (or arXiv:2310.15403v2 [eess.SY] for this version)
  https://doi.org/10.48550/arXiv.2310.15403
Journal reference: Journal of Electronics and Informatics, September 2023, Volume 5, Issue 3, Pages 320-334
Related DOI: https://doi.org/10.36548/jei.2023.3.006

Submission history

From: Rakesh Kanjilal [view email]
[v1] Mon, 23 Oct 2023 23:16:20 UTC (875 KB)
[v2] Thu, 26 Oct 2023 21:45:10 UTC (1,075 KB)
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