Title:Ultrasensitive charge detection utilizing coupled nonlinear micromechanical resonators

Abstract:Since the discovery of electrons, an accurate detection of electrical charges has been the dream of scientific community. Due to some remarkable advantages, micro/nano-electromechanical systems (M/NEMS) based resonators have been used to design electrometers with exquisite sensitivity and resolution. Inevitably, some limits including requisite ultra-low environmental temperature, complicated resonator structure and measurement circuit, required linear dynamic response, will cause a gap with respect to practical application. Here, we demonstrate a novel ultra-sensitive charge detection based on the linear dependence of peak frequency drift on the coupling voltage variation of two coupled nonlinear micromechanical resonators. We achieved ultra-high resolution of 2.051E-3 fC (about 13 electrons) of charge detection at the room temperature. We also show an extra application of this device for weak and ultra-low-frequency (ULF) signal detection. Our findings provide a simple strategy for measuring electron charges in an extreme accuracy and developing electrometers in smaller sizes.