Title:Enhancing Heat Transport across Chemical-vapor-deposited Diamond-Si Interfaces by Nanoscale Patterning

Abstract:The development of electronic devices, especially those which involve heterogeneous integration of materials, has led to increased challenges in addressing their thermal operational temperature demands. The heat flow in these systems is significantly influenced or even dominated by thermal boundary resistance (TBR) that exists at the interface between dissimilar materials found in their device architecture. Recently, it has been shown that selective patterning of features at an interface can greatly impact the TBR. However, a good understanding of interface features affecting material growth and subsequently heat transport across the interface and the adjacent materials is still lacking. Our work addresses this gap and experimentally demonstrates a link between nanopatterned interfaces and TBR for Si-diamond interfaces. Moreover, we find that this interfacial patterning influences both the TBR as well as the texture of the diamond grown on the interface by chemical vapor deposition. It was found that the preferred microstructural orientation can also lead to an enhancement in thermal properties. Through these experiments, we observed the lowest diamond-silicon TBR measured to date and a 28% increase in diamond thermal conductivity in 2-{\mu}m-thick films due to the strong texturing induced in the diamond near the interface. These results show that through the judicious selection of interfacial patterns, it is possible to create multiple synergistic effects that result in an overall reduction in thermal resistance in heterogeneously integrated electronics that involve polycrystalline materials.