Title:Synthesis of Low-loss Single-crystalline Silver Films for Quantum Nanophotonics

Abstract:Losses in metals and mass production compatibility represent the most serious challenges limiting the widespread practical application of plasmonic devices. Many recent studies have focused on developing alternative low-loss materials, but silver is by far potentially the most preferred plasmonic material because it has the lowest optical losses among all the metals and the longest propagation length of surface plasmon polaritons at optical and near-IR frequencies. In this paper, a a two-step process (SCULL process) for atomically flat sub-50-nm-thick single-crystalline silver film deposition is demonstrated, which is reproducible in a few hours under standard cleanroom enviroment. Thin film growth is self-controlled by quantum size effects, which enables the deposition of perfect silver films on non-ideally lattice-matched substrates, even with imperfect standard deposition tools and process deviations. Because of single-crystalline silver films unique properties, including a 35 nm minimum thickness, sub-100 pm surface roughness, and ultra low-loss dielectric permittivity, they opened fundamentally new possibilities in nanophotonics and quantum technology. Using SCULL films, the all-silver ultrabright room-temperature single-photon quantum emitters were demonstrated. The SCULL process has been approved for silver, gold and aluminum film evaporation, and it could be used for a variety of atomically flat sub-100 nm single-crystalline metal films deposition.