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Physics > Instrumentation and Detectors

arXiv:1509.02499 (physics)
[Submitted on 5 Sep 2015 (v1), last revised 3 Jan 2016 (this version, v2)]

Title:Variable-spot ion beam figuring

Authors:Lixiang Wu, Keqiang Qiu, Shaojun Fu
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Abstract:This paper introduces a new scheme of ion beam figuring (IBF), or rather variable-spot IBF, which is conducted at a constant scanning velocity with variable-spot ion beam collimated by a variable diaphragm. It aims at improving the reachability and adaptation of the figuring process within the limits of machine dynamics by varying the ion beam spot size instead of the scanning velocity. In contrast to the dwell time algorithm in the conventional IBF, the variable-spot IBF adopts a new algorithm, which consists of the scan path programming and the trajectory optimization using pattern search. In this algorithm, instead of the dwell time, a new concept, integral etching time, is proposed to interpret the process of variable-spot IBF. We conducted simulations to verify its feasibility and practicality. The simulation results indicate the variable-spot IBF is a promising alternative to the conventional approach.
Comments: 17 pages, 11 figures, 2 tables
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1509.02499 [physics.ins-det]
  (or arXiv:1509.02499v2 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.1509.02499
Related DOI: https://doi.org/10.1016/j.nimb.2016.01.009

Submission history

From: Lixiang Wu [view email]
[v1] Sat, 5 Sep 2015 12:44:37 UTC (7,315 KB)
[v2] Sun, 3 Jan 2016 09:43:34 UTC (5,752 KB)
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