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Physics > Optics

arXiv:1504.04556 (physics)
[Submitted on 17 Apr 2015]

Title:Better 3D Inspection with Structured Illumination Part I: Signal Formation and Precision

Authors:Zheng Yang, Alexander Kessel, Gerd Häusler
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Abstract:For quality control in the factory, 3D-metrology faces increasing demands for high precision and for more space-bandwidth-speed-product SBSP (number of 3D-points/sec). As a potential solution, we will discuss Structured-Illumination Microscopy (SIM). We distinguish optically smooth and rough surfaces and develop a theoretical model of the signal formation for both surface species. This model is exploited to investigate the physical limits of the precision and to give rules to optimize the sensor parameters for best precision or high speed. This knowledge can profitably be combined with fast scanning strategies, to maximize the SBSP, which will be discussed in paper part II.
Comments: 7 pages, 5 figures, submitted to Applied Optics on April 17, 2015
Subjects: Optics (physics.optics)
Cite as: arXiv:1504.04556 [physics.optics]
  (or arXiv:1504.04556v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.1504.04556
Related DOI: https://doi.org/10.1364/AO.54.006652

Submission history

From: Zheng Yang [view email]
[v1] Fri, 17 Apr 2015 16:25:41 UTC (810 KB)
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