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Condensed Matter > Materials Science

arXiv:1410.2611 (cond-mat)
[Submitted on 9 Oct 2014]

Title:Growth of alpha-beta phase W thin films over steep Al topography in a confocal sputtering machine

Authors:John Mark Kreikebaum, Blas Cabrera, Jeff Yen, Paul Brink, Astrid Tomada, Matt Cherry, Betty Young
View a PDF of the paper titled Growth of alpha-beta phase W thin films over steep Al topography in a confocal sputtering machine, by John Mark Kreikebaum and 6 other authors
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Abstract:We report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors (QETs) used in the design of Cryogenic Dark Matter Search (CDMS) detectors. The work was performed as part of a detector upgrade project that included optimization of a new confocal sputtering system and development of etch recipes compatible with patterning 40 nm-thick, mixed-phase W films deposited on 300-600 nm-thick, patterned Al. We found that our standard exothermic Al wet etch recipes provided inadequate W/Al interfaces and led to poor device performance. We developed a modified Al wet-etch recipe that effectively mitigates geometrical step-coverage limitations while maintaining our existing device design. Data presented here include SEM and FIB images of films and device interfaces obtained with the new Al etch method. We also introduce a method for quantitatively measuring the energy collection efficiency through these interfaces.
Comments: 9 pages; 7 figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1410.2611 [cond-mat.mtrl-sci]
  (or arXiv:1410.2611v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1410.2611
arXiv-issued DOI via DataCite

Submission history

From: John Mark Kreikebaum [view email]
[v1] Thu, 9 Oct 2014 20:25:55 UTC (1,494 KB)
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