Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Physics > Plasma Physics

arXiv:1305.4805 (physics)
[Submitted on 21 May 2013]

Title:Bimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputtering

Authors:Marina Prenzel, Annika Kortmann, Adrian Stein, Achim von Keudell, Farwah Nahif, Jochen M. Schneider
View PDF
Abstract:Al2O3 thin films have been deposited at substrate temperatures between 500°C to 600°C by reactive magnetron sputtering using an additional arbitrary substrate bias to tailor the energy distribution of the incident ions. The films were characterized by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The film structure being amorphous, nanocrystalline, or crystalline was correlated with characteristic ion energy distributions. The evolving crystalline structure is connected with different levels of displacements per atom (dpa) in the growing film as being derived from TRIM simulations. The boundary between the formation of crystalline films and amorphous or nanocrystalline films was at 0.9 dpa for a substrate temperature of 500°C. This threshold shifts to 0.6 dpa for films grown at 550°C.
Subjects: Plasma Physics (physics.plasm-ph); Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1305.4805 [physics.plasm-ph]
  (or arXiv:1305.4805v1 [physics.plasm-ph] for this version)
  https://doi.org/10.48550/arXiv.1305.4805
Related DOI: https://doi.org/10.1063/1.4819227

Submission history

From: Marina Prenzel [view email]
[v1] Tue, 21 May 2013 12:59:43 UTC (1,605 KB)
Full-text links:

Access Paper:

  • View PDF
  • TeX Source
  • Other Formats
view license
Current browse context:
physics.plasm-ph
< prev   |   next >
new | recent | 2013-05
Change to browse by:
cond-mat
cond-mat.mtrl-sci
physics

References & Citations

export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)