Title:Direct and alignment-insensitive measurement of cantilever curvature

Abstract:Silicon-based microfabrication has enabled not only the electronics revolution but also made micromechanics nearly as ubiquitous, with applications from motion sensing to biochemical analysis\cite{Lavrik2004,Raiteri2001}. The atomic force microscope \cite{Binnig1986,Hwang2009}, where the motion of a small tip at the end of a cantilever traces nanoscale features on surfaces, provides the fundamental paradigms for nanomechanical metrology, including optical readouts of cantilever displacement and bending. Such readout typically requires careful and costly alignment of mechanical and optical elements. Here we demonstrate an alternative approach based on the recognition that in many applications we are interested not so much in the motion of a tip as in the overall curvature of a cantilever. In particular, near field imaging of entire cantilevers yields diffraction patterns providing precise measures of the tilt, curvature and higher order bending components of cantilevers. Even while we have used very inexpensive components and no careful alignment is required, we obtain sensitivity to nm-scale motion of the cantilever end.