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Physics > Instrumentation and Detectors

arXiv:1210.7951 (physics)
[Submitted on 30 Oct 2012]

Title:Comparison of different sources for laboratory X-ray microscopy

Authors:Thomas Ebensperger, Philipp Stahlhut, Frank Nachtrab, Simon Zabler, Randolf Hanke
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Abstract:This paper describes the setup of two different solutions for laboratory X-ray microscopy working with geometric magnification. One setup uses thin-film transmission targets with an optimized tungsten-layer thickness and the electron gun and optics of an electron probe micro analyzer to generate a very small X-ray source. The other setup is based on a scanning electron microscope and uses microstructured reflection targets. We also describe the structuring process for these targets. In both cases we show that resolutions of 100 nm can be achieved. Also the possibilities of computed tomography for 3D imaging are explored and we show first imaging examples of high-absorption as well as low-absorption specimens to demonstrate the capabilities of the setups.
Comments: 6 pages, 4 figures, proceedings of the 14th International Workshop on Radiation Imaging Detectors
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1210.7951 [physics.ins-det]
  (or arXiv:1210.7951v1 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.1210.7951
Related DOI: https://doi.org/10.1088/1748-0221/7/10/C10008

Submission history

From: Thomas Ebensperger [view email]
[v1] Tue, 30 Oct 2012 10:22:56 UTC (5,696 KB)
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