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Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:1206.4776 (cond-mat)
[Submitted on 21 Jun 2012]

Title:High Performance Single Layered WSe2 p-FETs with Chemically Doped Contacts

Authors:Hui Fang, Steven Chuang, Ting Chia Chang, Kuniharu Takei, Toshitake Takahashi, Ali Javey
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Abstract:We report high performance p-type field-effect transistors based on single layered (thickness, ~0.7 nm) WSe2 as the active channel with chemically doped source/drain contacts and high-{\kappa} gate dielectrics. The top-gated monolayer transistors exhibit a high effective hole mobility of ~250 cm2/Vs, perfect subthreshold swing of ~60 mV/dec, and ION/IOFF of >10^6 at room temperature. Special attention is given to lowering the contact resistance for hole injection by using high work function Pd contacts along with degenerate surface doping of the contacts by patterned NO2 chemisorption on WSe2. The results here present a promising material system and device architecture for p-type monolayer transistors with excellent characteristics.
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:1206.4776 [cond-mat.mes-hall]
  (or arXiv:1206.4776v1 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.1206.4776
Related DOI: https://doi.org/10.1021/nl301702r

Submission history

From: Hui Fang [view email]
[v1] Thu, 21 Jun 2012 05:04:18 UTC (1,271 KB)
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