Showing 1–2 of 2 results for author: Boto, A N

Quantum interferometric optical lithography:towards arbitrary two-dimensional patterns

Authors: Pieter Kok, Agedi N. Boto, Daniel S. Abrams, Colin P. Williams, Samuel L. Braunstein, Jonathan P. Dowling

Abstract: As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology. As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology. △ Less

Submitted 9 May, 2001; v1 submitted 21 November, 2000; originally announced November 2000.

Comments: 9 pages, 5 figures Revtex

Journal ref: Phys. Rev. A 63, 063407 (2001)

Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat The Diffraction Limit

Authors: Agedi N. Boto, Pieter Kok, Daniel S. Abrams, Samuel L. Braunstein, Colin P. Williams, Jonathan P. Dowling

Abstract: Classical, interferometric, optical lithography is diffraction limited to writing features of a size lambda/2 or greater, where lambda is the optical wavelength. Using nonclassical photon number states, entangled N at a time, we show that it is possible to write features of minimum size lambda/(2N) in an N-photon absorbing substrate. This result surpasses the usual classical diffraction limit by… ▽ More Classical, interferometric, optical lithography is diffraction limited to writing features of a size lambda/2 or greater, where lambda is the optical wavelength. Using nonclassical photon number states, entangled N at a time, we show that it is possible to write features of minimum size lambda/(2N) in an N-photon absorbing substrate. This result surpasses the usual classical diffraction limit by a factor of N. Since the number of features that can be etched on a two-dimensional surface scales inversely as the square of the feature size, this allows one to write a factor of N^2 more elements on a semiconductor chip. A factor of N = 2 can be achieved easily with entangled photon pairs generated from optical parametric downconversion. It is shown how to write arbitrary 2D patterns by using this method. △ Less

Submitted 3 May, 2000; v1 submitted 10 December, 1999; originally announced December 1999.

Comments: 9 pages, 2 figures

Journal ref: Phys. Rev. Lett. 85, 2733 (2000)