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A nanofabricated, monolithic, path-separated electron interferometer
Abstract: We report a self-aligned, monolithic electron interferometer, consisting of two 45 nm thick silicon layers separated by 20 $μ$m. This interferometer was fabricated from a single crystal silicon cantilever on a transmission electron microscope grid by gallium focused ion-beam milling. Using this interferometer, we demonstrate beam path-separation, and obtain interference fringes in a Mach-Zehnder g… ▽ More
Submitted 12 September, 2016; v1 submitted 30 August, 2016; originally announced August 2016.
Comments: 21 pages (including supplementary info), 8 figures; Corrected typos, added references for introduction and conclusion, changed ordering of paragraphs of Discussion, results unchanged