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Geometry dependence of TLS noise and loss in a-SiC:H parallel plate capacitors for superconducting microwave resonators
Authors:
K. Kouwenhoven,
G. P. J. van Doorn,
B. T. Buijtendorp,
S. A. H. de Rooij,
D. Lamers,
D. J. Thoen,
V. Murugesan,
J. J. A. Baselmans,
P. J. de Visser
Abstract:
Parallel plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling Two-Level Systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency n…
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Parallel plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling Two-Level Systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency noise level depends on the PPC's dimensions has not been experimentally addressed. We measure the frequency noise of 56 resonators with a-SiC:H PPCs, which cover a factor 44 in PPC area and a factor 4 in dielectric thickness. To support the noise analysis, we measure the TLS-induced, power-dependent, intrinsic loss and temperature-dependent resonance frequency shift of the resonators. From the TLS models, we expect a geometry-independent microwave loss and resonance frequency shift, set by the TLS properties of the dielectric. However, we observe a thickness-dependent microwave loss and resonance frequency shift, explained by surface layers that limit the performance of PPC-based resonators. For a uniform dielectric, the frequency noise level should scale directly inversely with the PPC area and thickness. We observe that an increase in PPC size reduces the frequency noise, but the exact scaling is, in some cases, weaker than expected. Finally, we derive an engineering guideline for the design of KIDs based on PPC-based resonators.
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Submitted 8 May, 2024; v1 submitted 21 November, 2023;
originally announced November 2023.
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Resolving Power of Visible to Near-Infrared Hybrid $β$-Ta/NbTiN Kinetic Inductance Detectors
Authors:
Kevin Kouwenhoven,
Daniel Fan,
Enrico Biancalani,
Steven A. H. de Rooij,
Tawab Karim,
Carlas S. Smith,
Vignesh Murugesan,
David J. Thoen,
Jochem J. A. Baselmans,
Pieter J. de Visser
Abstract:
Kinetic Inductance Detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a beta phase tantalum ($β$-Ta) inductor and a NbTiN interdigitated capacitor (IDC). The devices show an average intrinsic quality factor $Q_i$ of 4.3$\times10^5$ $\pm$ 1.3 $\times10^5$. To increase the powe…
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Kinetic Inductance Detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a beta phase tantalum ($β$-Ta) inductor and a NbTiN interdigitated capacitor (IDC). The devices show an average intrinsic quality factor $Q_i$ of 4.3$\times10^5$ $\pm$ 1.3 $\times10^5$. To increase the power captured by the light sensitive inductor, we 3D-print an array of 150$\times$150 $μ$m resin micro lenses on the backside of the sapphire substrate. The shape deviation between design and printed lenses is smaller than 1$μ$m, and the alignment accuracy of this process is $δ_x = +5.8 \pm 0.5$ $μ$m and $δ_y = +8.3 \pm 3.3$ $μ$m. We measure a resolving power for 1545-402 nm that is limited to 4.9 by saturation in the KID's phase response. We can model the saturation in the phase response with the evolution of the number of quasiparticles generated by a photon event. An alternative coordinate system that has a linear response raises the resolving power to 5.9 at 402 nm. We verify the measured resolving power with a two-line measurement using a laser source and a monochromator. We discuss several improvements that can be made to the devices on a route towards KID arrays with high resolving powers.
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Submitted 13 February, 2023; v1 submitted 12 July, 2022;
originally announced July 2022.
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Model and Measurements of an Optical Stack for Broadband Visible to Near-IR Absorption in TiN KIDs
Authors:
K. Kouwenhoven,
I. Elwakil,
J. van Wingerden,
V. Murugesan,
D. J. Thoen,
J. J. A. Baselmans,
P. J. de Visser
Abstract:
Typical materials for optical Kinetic Inductance Detetectors (KIDs) are metals with a natural absorption of 30-50% in the visible and near-infrared. To reach high absorption efficiencies (90-100%) the KID must be embedded in an optical stack. We show an optical stack design for a 60 nm TiN film. The optical stack is modeled as sections of transmission lines, where the parameters for each section a…
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Typical materials for optical Kinetic Inductance Detetectors (KIDs) are metals with a natural absorption of 30-50% in the visible and near-infrared. To reach high absorption efficiencies (90-100%) the KID must be embedded in an optical stack. We show an optical stack design for a 60 nm TiN film. The optical stack is modeled as sections of transmission lines, where the parameters for each section are related to the optical properties of each layer. We derive the complex permittivity of the TiN film from a spectral ellipsometry measurement. The designed optical stack is optimised for broadband absorption and consists of, from top (illumination side) to bottom: 85 nm SiOx, 60 nm TiN, 23 nm of SiOx, and a 100 nm thick Al mirror. We show the modeled absorption and reflection of this stack, which has >80% absorption from 400 nm to 1550 nm and near-unity absorption for 500 nm to 800 nm. We measure transmission and reflection of this stack with a commercial spectrophotometer. The results are in good agreement with the model.
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Submitted 15 August, 2022; v1 submitted 12 October, 2021;
originally announced October 2021.
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Phonon-trapping enhanced energy resolution in superconducting single photon detectors
Authors:
Pieter J. de Visser,
Steven A. H. de Rooij,
Vignesh Murugesan,
David J. Thoen,
Jochem J. A. Baselmans
Abstract:
A noiseless, photon counting detector, which resolves the energy of each photon, could radically change astronomy, biophysics and quantum optics. Superconducting detectors promise an intrinsic resolving power at visible wavelengths of $R=E/δE\approx100$ due to their low excitation energy. We study superconducting energy-resolving Microwave Kinetic Inductance Detectors (MKIDs), which hold particula…
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A noiseless, photon counting detector, which resolves the energy of each photon, could radically change astronomy, biophysics and quantum optics. Superconducting detectors promise an intrinsic resolving power at visible wavelengths of $R=E/δE\approx100$ due to their low excitation energy. We study superconducting energy-resolving Microwave Kinetic Inductance Detectors (MKIDs), which hold particular promise for larger cameras. A visible/near-infrared photon absorbed in the superconductor creates a few thousand quasiparticles through several stages of electron-phonon interaction. Here we demonstrate experimentally that the resolving power of MKIDs at visible to near-infrared wavelengths is limited by the loss of hot phonons during this process. We measure the resolving power of our aluminum-based detector as a function of photon energy using four lasers with wavelengths between $1545-402$ nm. For detectors on thick SiN/Si and sapphire substrates the resolving power is limited to $10-21$ for the respective wavelengths, consistent with the loss of hot phonons. When we suspend the sensitive part of the detector on a 110 nm thick SiN membrane, the measured resolving power improves to $19-52$ respectively. The improvement is equivalent to a factor $8\pm2$ stronger phonon trapping on the membrane, which is consistent with a geometrical phonon propagation model for these hot phonons. We discuss a route towards the Fano limit by phonon engineering.
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Submitted 11 March, 2021;
originally announced March 2021.
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A Composite Phononic Crystal Design for Quasiparticle Lifetime Enhancement in Kinetic Inductance Detectors
Authors:
Tuomas A. Puurtinen,
Karwan Rostem,
Pieter J. de Visser,
Ilari J. Maasilta
Abstract:
A nanoscale phononic crystal filter (reflector) is designed for a kinetic inductance detector where the reflection band is matched to the quasiparticle recombination phonons with the aim to increase quasiparticle lifetime in the superconducting resonator. The inductor is enclosed by a 1 um wide phononic crystal membrane section with two simple hole patterns that each contain a partial spectral gap…
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A nanoscale phononic crystal filter (reflector) is designed for a kinetic inductance detector where the reflection band is matched to the quasiparticle recombination phonons with the aim to increase quasiparticle lifetime in the superconducting resonator. The inductor is enclosed by a 1 um wide phononic crystal membrane section with two simple hole patterns that each contain a partial spectral gap for various high frequency phonon modes. The phononic crystal is narrow enough for low frequency thermal phonons to propagate unimpeded. With 3D phonon scattering simulations over a 40 dB attenuation in transmitted power is found for the crystal, which was previously estimated to give a lifetime enhancement of nearly two orders of magnitude.
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Submitted 23 September, 2019;
originally announced September 2019.
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Mitigation of Cosmic Ray Effect on Microwave Kinetic Inductance Detector Arrays
Authors:
K. Karatsu,
A. Endo,
J. Bueno,
P. J. de Visser,
R. Barends,
D. J. Thoen,
V. Murugesan,
N. Tomita,
J. J. A. Baselmans
Abstract:
For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing fo…
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For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of $\sim$960 pixels and fabricated on monolithic 55 mm $\times$ 55 mm $\times$ 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference; an array with a low $T_c$ superconducting film as phonon absorber on the opposite side of the substrate; and arrays with MKIDs on membranes. The idea is that the low $T_c$ layer down-converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1 % for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers.
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Submitted 10 January, 2019; v1 submitted 8 January, 2019;
originally announced January 2019.
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Equivalence of Optical and Electrical Noise Equivalent Power of Hybrid NbTiN-Al Microwave Kinetic Inductance Detectors
Authors:
R. M. J. Janssen,
A. Endo,
P. J. de Visser,
T. M. Klapwijk,
J. J. A. Baselmans
Abstract:
We have measured and compared the response of hybrid NbTiN-Al Microwave Kinetic Inductance Detectors (MKIDs) to changes in bath temperature and illumination by sub-mm radiation. We show that these two stimulants have an equivalent effect on the resonance feature of hybrid MKIDs. We determine an electrical NEP from the measured temperature responsivity, quasiparticle recombination time, superconduc…
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We have measured and compared the response of hybrid NbTiN-Al Microwave Kinetic Inductance Detectors (MKIDs) to changes in bath temperature and illumination by sub-mm radiation. We show that these two stimulants have an equivalent effect on the resonance feature of hybrid MKIDs. We determine an electrical NEP from the measured temperature responsivity, quasiparticle recombination time, superconducting transition temperature and noise spectrum, all of which can be measured in a dark environment. For the two hybrid NbTiN-Al MKIDs studied in detail the electrical NEP is within a factor of two of the optical NEP, which is measured directly using a blackbody source.
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Submitted 17 November, 2014; v1 submitted 14 August, 2014;
originally announced August 2014.
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Power Handling and Responsivity of Submicron Wide Superconducting Coplanar Waveguide Resonators
Authors:
R. M. J. Janssen,
A. Endo,
J. J. A. Baselmans,
P. J. de Visser,
R. Barends,
T. M. Klapwijk
Abstract:
The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 μm). CPW resonators w…
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The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 μm). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. In a systematic study of quarter-wave CPW resonators with varying widths it is shown that the behavior of responsivity, noise and power handling as a function of width continues down to 300 nm. This encourages the development of narrow KIDs using Al in order to improve their sensitivity.
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Submitted 4 June, 2012;
originally announced June 2012.
