Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges
Authors:
Sarveshwar Sharma,
N. Sirse,
A. Sen,
J. S. Wu,
M. M. Turner
Abstract:
The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied using a self-consistent particle-in-cell (PIC) simulation code. At a driving frequency of 60 MHz and 5 mTorr of argon gas pressure, the discharge voltage is varied from 10V to 150 V for a fixed discharge gap. It is…
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The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied using a self-consistent particle-in-cell (PIC) simulation code. At a driving frequency of 60 MHz and 5 mTorr of argon gas pressure, the discharge voltage is varied from 10V to 150 V for a fixed discharge gap. It is observed that an increase in the discharge voltage causes filamentation in the electric field transients and to create multiple higher harmonics in the bulk plasma. Correspondingly, higher harmonics, up to 7th harmonic, in the discharge current are also observed. The power in the higher harmonics increases with a rise in the discharge voltage. The plasma density continues to increase with the discharge voltage but in a non-linear manner, whereas, the bulk electron temperature decreases. Meanwhile, the electron energy distribution function (EEDF) evolves from a Maxwellian at lower discharge voltages to a bi-Maxwellian at higher discharge voltages.
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Submitted 3 April, 2019;
originally announced April 2019.
Phasing diffuse scattering. Application of the SIR2002 algorithm to the non-crystallographic phase problem
Authors:
B. Carrozzini,
G. L. Cascarano,
L. De Caro,
C. Giacovazzo,
S. Marchesini,
H. N. Chapman,
H. He,
M. R. Howells,
J. S. Wu,
U. Weierstall,
J. C. H. Spence
Abstract:
A new phasing algorithm has been used to determine the phases of diffuse elastic X-ray scattering from a non-periodic array of gold balls of 50 nm diameter. Two-dimensional real-space images, showing the charge-density distribution of the balls, have been reconstructed at 50 nm resolution from transmission diffraction patterns recorded at 550 eV energy. The reconstructed image fits well with sca…
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A new phasing algorithm has been used to determine the phases of diffuse elastic X-ray scattering from a non-periodic array of gold balls of 50 nm diameter. Two-dimensional real-space images, showing the charge-density distribution of the balls, have been reconstructed at 50 nm resolution from transmission diffraction patterns recorded at 550 eV energy. The reconstructed image fits well with scanning electron microscope (SEM) image of the same sample. The algorithm, which uses only the density modification portion of the SIR2002 program, is compared with the results obtained via the Gerchberg-Saxton-Fienup HIO algorithm. In this way the relationship between density modification in crystallography and the HiO algorithm used in signal and image processing is elucidated.
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Submitted 15 April, 2004;
originally announced April 2004.
