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Optically accessible high-finesse millimeter-wave resonator for cavity quantum electrodynamics with atom arrays
Authors:
Tony Zhang,
Michelle Wu,
Sam R. Cohen,
Lin Xin,
Debadri Das,
Kevin K. S. Multani,
Nolan Peard,
Anne-Marie Valente-Feliciano,
Paul B. Welander,
Amir H. Safavi-Naeini,
Emilio A. Nanni,
Monika Schleier-Smith
Abstract:
Cavity quantum electrodynamics (QED) is a powerful tool in quantum science, enabling preparation of non-classical states of light and scalable entanglement of many atoms coupled to a single field mode. While the most coherent atom-photon interactions have been achieved using superconducting millimeter-wave cavities coupled to Rydberg atoms, these platforms so far lack the optical access required f…
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Cavity quantum electrodynamics (QED) is a powerful tool in quantum science, enabling preparation of non-classical states of light and scalable entanglement of many atoms coupled to a single field mode. While the most coherent atom-photon interactions have been achieved using superconducting millimeter-wave cavities coupled to Rydberg atoms, these platforms so far lack the optical access required for trapping and addressing individual atomic qubits. We present a millimeter-wave Fabry-Pérot cavity with finesse $5.8(1) \times 10^7$ at a temperature of 1 K providing generous transverse optical access (numerical aperture 0.56). Conflicting goals of strong atom-photon coupling and optical access motivate a near-confocal geometry. Close to confocality, however, post-paraxial corrections to the cavity spectrum introduce unexpected degeneracies between transverse modes, leading to excess cavity loss. Modeling these corrections allows for tuning the cavity geometry to evade this loss, producing a high finesse that will enable cavity QED experiments with trapped atoms deep in the strong coupling regime.
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Submitted 6 June, 2025;
originally announced June 2025.
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Future Circular Collider Feasibility Study Report: Volume 2, Accelerators, Technical Infrastructure and Safety
Authors:
M. Benedikt,
F. Zimmermann,
B. Auchmann,
W. Bartmann,
J. P. Burnet,
C. Carli,
A. Chancé,
P. Craievich,
M. Giovannozzi,
C. Grojean,
J. Gutleber,
K. Hanke,
A. Henriques,
P. Janot,
C. Lourenço,
M. Mangano,
T. Otto,
J. Poole,
S. Rajagopalan,
T. Raubenheimer,
E. Todesco,
L. Ulrici,
T. Watson,
G. Wilkinson,
A. Abada
, et al. (1439 additional authors not shown)
Abstract:
In response to the 2020 Update of the European Strategy for Particle Physics, the Future Circular Collider (FCC) Feasibility Study was launched as an international collaboration hosted by CERN. This report describes the FCC integrated programme, which consists of two stages: an electron-positron collider (FCC-ee) in the first phase, serving as a high-luminosity Higgs, top, and electroweak factory;…
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In response to the 2020 Update of the European Strategy for Particle Physics, the Future Circular Collider (FCC) Feasibility Study was launched as an international collaboration hosted by CERN. This report describes the FCC integrated programme, which consists of two stages: an electron-positron collider (FCC-ee) in the first phase, serving as a high-luminosity Higgs, top, and electroweak factory; followed by a proton-proton collider (FCC-hh) at the energy frontier in the second phase.
FCC-ee is designed to operate at four key centre-of-mass energies: the Z pole, the WW production threshold, the ZH production peak, and the top/anti-top production threshold - delivering the highest possible luminosities to four experiments. Over 15 years of operation, FCC-ee will produce more than 6 trillion Z bosons, 200 million WW pairs, nearly 3 million Higgs bosons, and 2 million top anti-top pairs. Precise energy calibration at the Z pole and WW threshold will be achieved through frequent resonant depolarisation of pilot bunches. The sequence of operation modes remains flexible.
FCC-hh will operate at a centre-of-mass energy of approximately 85 TeV - nearly an order of magnitude higher than the LHC - and is designed to deliver 5 to 10 times the integrated luminosity of the HL-LHC. Its mass reach for direct discovery extends to several tens of TeV. In addition to proton-proton collisions, FCC-hh is capable of supporting ion-ion, ion-proton, and lepton-hadron collision modes.
This second volume of the Feasibility Study Report presents the complete design of the FCC-ee collider, its operation and staging strategy, the full-energy booster and injector complex, required accelerator technologies, safety concepts, and technical infrastructure. It also includes the design of the FCC-hh hadron collider, development of high-field magnets, hadron injector options, and key technical systems for FCC-hh.
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Submitted 25 April, 2025;
originally announced May 2025.
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Future Circular Collider Feasibility Study Report: Volume 3, Civil Engineering, Implementation and Sustainability
Authors:
M. Benedikt,
F. Zimmermann,
B. Auchmann,
W. Bartmann,
J. P. Burnet,
C. Carli,
A. Chancé,
P. Craievich,
M. Giovannozzi,
C. Grojean,
J. Gutleber,
K. Hanke,
A. Henriques,
P. Janot,
C. Lourenço,
M. Mangano,
T. Otto,
J. Poole,
S. Rajagopalan,
T. Raubenheimer,
E. Todesco,
L. Ulrici,
T. Watson,
G. Wilkinson,
P. Azzi
, et al. (1439 additional authors not shown)
Abstract:
Volume 3 of the FCC Feasibility Report presents studies related to civil engineering, the development of a project implementation scenario, and environmental and sustainability aspects. The report details the iterative improvements made to the civil engineering concepts since 2018, taking into account subsurface conditions, accelerator and experiment requirements, and territorial considerations. I…
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Volume 3 of the FCC Feasibility Report presents studies related to civil engineering, the development of a project implementation scenario, and environmental and sustainability aspects. The report details the iterative improvements made to the civil engineering concepts since 2018, taking into account subsurface conditions, accelerator and experiment requirements, and territorial considerations. It outlines a technically feasible and economically viable civil engineering configuration that serves as the baseline for detailed subsurface investigations, construction design, cost estimation, and project implementation planning. Additionally, the report highlights ongoing subsurface investigations in key areas to support the development of an improved 3D subsurface model of the region.
The report describes development of the project scenario based on the 'avoid-reduce-compensate' iterative optimisation approach. The reference scenario balances optimal physics performance with territorial compatibility, implementation risks, and costs. Environmental field investigations covering almost 600 hectares of terrain - including numerous urban, economic, social, and technical aspects - confirmed the project's technical feasibility and contributed to the preparation of essential input documents for the formal project authorisation phase. The summary also highlights the initiation of public dialogue as part of the authorisation process. The results of a comprehensive socio-economic impact assessment, which included significant environmental effects, are presented. Even under the most conservative and stringent conditions, a positive benefit-cost ratio for the FCC-ee is obtained. Finally, the report provides a concise summary of the studies conducted to document the current state of the environment.
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Submitted 25 April, 2025;
originally announced May 2025.
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Future Circular Collider Feasibility Study Report: Volume 1, Physics, Experiments, Detectors
Authors:
M. Benedikt,
F. Zimmermann,
B. Auchmann,
W. Bartmann,
J. P. Burnet,
C. Carli,
A. Chancé,
P. Craievich,
M. Giovannozzi,
C. Grojean,
J. Gutleber,
K. Hanke,
A. Henriques,
P. Janot,
C. Lourenço,
M. Mangano,
T. Otto,
J. Poole,
S. Rajagopalan,
T. Raubenheimer,
E. Todesco,
L. Ulrici,
T. Watson,
G. Wilkinson,
P. Azzi
, et al. (1439 additional authors not shown)
Abstract:
Volume 1 of the FCC Feasibility Report presents an overview of the physics case, experimental programme, and detector concepts for the Future Circular Collider (FCC). This volume outlines how FCC would address some of the most profound open questions in particle physics, from precision studies of the Higgs and EW bosons and of the top quark, to the exploration of physics beyond the Standard Model.…
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Volume 1 of the FCC Feasibility Report presents an overview of the physics case, experimental programme, and detector concepts for the Future Circular Collider (FCC). This volume outlines how FCC would address some of the most profound open questions in particle physics, from precision studies of the Higgs and EW bosons and of the top quark, to the exploration of physics beyond the Standard Model. The report reviews the experimental opportunities offered by the staged implementation of FCC, beginning with an electron-positron collider (FCC-ee), operating at several centre-of-mass energies, followed by a hadron collider (FCC-hh). Benchmark examples are given of the expected physics performance, in terms of precision and sensitivity to new phenomena, of each collider stage. Detector requirements and conceptual designs for FCC-ee experiments are discussed, as are the specific demands that the physics programme imposes on the accelerator in the domains of the calibration of the collision energy, and the interface region between the accelerator and the detector. The report also highlights advances in detector, software and computing technologies, as well as the theoretical tools /reconstruction techniques that will enable the precision measurements and discovery potential of the FCC experimental programme. This volume reflects the outcome of a global collaborative effort involving hundreds of scientists and institutions, aided by a dedicated community-building coordination, and provides a targeted assessment of the scientific opportunities and experimental foundations of the FCC programme.
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Submitted 25 April, 2025;
originally announced May 2025.
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First Results from Nb3Sn Coatings of 2.6 GHz Nb SRF Cavities Using DC Cylindrical Magnetron Sputtering System
Authors:
M. S. Shakel,
H. E. Elsayed-Ali,
G. Eremeev,
U. Pudasaini,
A. M. Valente-Feliciano
Abstract:
A DC cylindrical magnetron sputtering system has been commissioned and operated to deposit Nb3Sn onto 2.6 GHz Nb SRF cavities. After optimizing the deposition conditions in a mock-up cavity, Nb-Sn films are deposited first on flat samples by multilayer sequential sputtering of Nb and Sn, and later annealed at 950 °C for 3 hours. X-ray diffraction of the films showed multiple peaks for the Nb3Sn ph…
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A DC cylindrical magnetron sputtering system has been commissioned and operated to deposit Nb3Sn onto 2.6 GHz Nb SRF cavities. After optimizing the deposition conditions in a mock-up cavity, Nb-Sn films are deposited first on flat samples by multilayer sequential sputtering of Nb and Sn, and later annealed at 950 °C for 3 hours. X-ray diffraction of the films showed multiple peaks for the Nb3Sn phase and Nb (substrate). No peaks from any Nb3Sn compound other than Nb3Sn were detected. Later three 2.6 GHz Nb SRF cavities are coated with ~1 $μ$m thick Nb3Sn. The first Nb3Sn coated cavity reached close to Eacc = 8 MV/m, demonstrating a quality factor Q0 of 3.2 x 108 at Tbath = 4.4 K and Eacc = 5 MV/m, about a factor of three higher than that of Nb at this temperature. Q0 was close to 1.1 x 109, dominated by the residual resistance, at 2 K and Eacc = 5 MV/m. The Nb3Sn coated cavities demonstrated Tc in the range of 17.9 - 18 K. Here we present the commissioning experience, system optimization, and the first results from the Nb3Sn fabrication on flat samples and SRF cavities.
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Submitted 17 July, 2023;
originally announced July 2023.
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Scaling NbTiN-based ac-powered Josephson digital to 400M devices/cm$^2$
Authors:
Anna Herr,
Quentin Herr,
Steve Brebels,
Min-Soo Kim,
Ankit Pokhrel,
Blake Hodges,
Trent Josephsen,
Sabine ONeal,
Ruiheng Bai,
Katja Nowack,
Anne-Marie Valente-Feliciano,
Zsolt Tökei
Abstract:
We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$κ$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device density, efficient routing, and AC power distribution on a resonant network. The materials scale beyond 28nm lithography and are compatible with standard high-temper…
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We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$κ$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device density, efficient routing, and AC power distribution on a resonant network. The materials scale beyond 28nm lithography and are compatible with standard high-temperature CMOS processes. We report initial results for two-metal layer NbTiN wires with 50nm critical dimension. A semi-ascendance wire-and-via process module using 193i lithography and 50nm critical dimension has shown cross-section uniformity of 1%=1s across the 300mm wafer, critical temperature of 12.5K, and critical current of 0.1mA at 4.2K. We also present a new design of the resonant AC power network enabled by NbTiN wires and HZO MIM capacitors. The design matches the device density and provides a 30 GHz clock with estimated efficiency of up to 90%. Finally, magnetic imaging of patterned NbTiN ground planes shows low intrinsic defectivity and consistent trapping of vorteces in 0.5 mm holes spaced on a 20 $μ$m x 20 $μ$m grid.
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Submitted 29 April, 2023; v1 submitted 29 March, 2023;
originally announced March 2023.
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RF Accelerator Technology R&D: Report of AF7-rf Topical Group to Snowmass 2021
Authors:
Sergey Belomestnykh,
Emilio A. Nanni,
Hans Weise,
Sergey V. Baryshev,
Pashupati Dhakal,
Rongli Geng,
Bianca Giaccone,
Chunguang Jing,
Matthias Liepe,
Xueying Lu,
Tianhuan Luo,
Ganapati Myneni,
Alireza Nassiri,
David Neuffer,
Cho-Kuen Ng,
Sam Posen,
Sami Tantawi,
Anne-Marie Valente-Feliciano,
Jean-Luc Vay,
Brandon Weatherford,
Akira Yamamoto
Abstract:
Accelerator radio frequency (RF) technology has been and remains critical for modern high energy physics (HEP) experiments based on particle accelerators. Tremendous progress in advancing this technology has been achieved over the past decade in several areas highlighted in this report. These achievements and new results expected from continued R&D efforts could pave the way for upgrades of existi…
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Accelerator radio frequency (RF) technology has been and remains critical for modern high energy physics (HEP) experiments based on particle accelerators. Tremendous progress in advancing this technology has been achieved over the past decade in several areas highlighted in this report. These achievements and new results expected from continued R&D efforts could pave the way for upgrades of existing facilities, improvements to accelerators already under construction (e.g., PIP-II), well-developed proposals (e.g., ILC, CLIC), and/or enable concepts under development, such as FCC-ee, CEPC, C3, HELEN, multi-MW Fermilab Proton Intensity Upgrade, future Muon Colloder, etc. Advances in RF technology have impact beyond HEP on accelerators built for nuclear physics, basic energy sciences, and other areas. Recent examples of such accelerators are European XFEL, LCLS-II and LCLS-II-HE, SHINE, SNS, ESS, FRIB, and EIC. To support and enable new accelerator-based applications and even make some of them feasible, we must continue addressing their challenges via a comprehensive RF R&D program that would advance the existing RF technologies and explore the nascent ones.
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Submitted 25 August, 2022;
originally announced August 2022.
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Next-Generation Superconducting RF Technology based on Advanced Thin Film Technologies and Innovative Materials for Accelerator Enhanced Performance and Energy Reach
Authors:
A. - M. Valente-Feliciano,
C. Antoine,
S. Anlage,
G. Ciovati,
J. Delayen,
F. Gerigk,
A. Gurevich,
T. Junginger,
S. Keckert,
G. Keppe,
J. Knobloch,
T. Kubo,
O. Kugeler,
D. Manos,
C. Pira,
T. Proslier,
U. Pudasaini,
C. E. Reece,
R. A. Rimmer,
G. J. Rosaz,
T. Saeki,
R. Vaglio,
R. Valizadeh,
H. Vennekate,
W. Venturini Delsolaro
, et al. (3 additional authors not shown)
Abstract:
Superconducting RF is a key technology for future particle accelerators, now relying on advanced surfaces beyond bulk Nb for a leap in performance and efficiency. The SRF thin film strategy aims at transforming the current SRF technology by using highly functional materials, addressing all the necessary functions. The community is deploying efforts in three research thrusts to develop next-generat…
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Superconducting RF is a key technology for future particle accelerators, now relying on advanced surfaces beyond bulk Nb for a leap in performance and efficiency. The SRF thin film strategy aims at transforming the current SRF technology by using highly functional materials, addressing all the necessary functions. The community is deploying efforts in three research thrusts to develop next-generation thin-film based cavities. Nb on Cu cavities are developed to perform as good as or better than bulk Nb at reduced cost and with better thermal stability. Recent results showing improved accelerating field and dramatically reduced Q slope show their potential for many applications. The second research thrust is to develop cavities coated with materials that can operate at higher temperatures or sustain higher fields. Proof of principle has been established for the merit of Nb3Sn for SRF application. Research is now needed to further exploit the material and reach its full potential with novel deposition techniques. The third line of research is to push SRF performance beyond the capabilities of the superconductors alone with multilayered coatings. In parallel, developments are needed to provide quality substrates, cooling schemes and cryomodule design tailored to thin film cavities. Recent results in these three research thrusts suggest that SRF thin film technologies are at the eve of a technological revolution. For them to mature, active community support and sustained funding are needed to address fundamental developments supporting material deposition techniques, surface and RF research, technical challenges associated with scaling and industrialization. With dedicated and sustained investment, next-generation thin-film based cavities will become a reality with high performance and efficiency, facilitating energy sustainable science while enabling higher luminosity, and higher energy.
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Submitted 5 April, 2022;
originally announced April 2022.
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Key directions for research and development of superconducting radio frequency cavities
Authors:
S. Belomestnykh,
S. Posen,
D. Bafia,
S. Balachandran,
M. Bertucci,
A. Burrill,
A. Cano,
M. Checchin,
G. Ciovati,
L. D. Cooley,
G. Dalla Lana Semione,
J. Delayen,
G. Eremeev,
F. Furuta,
F. Gerigk,
B. Giaccone,
D. Gonnella,
A. Grassellino,
A. Gurevich,
W. Hillert,
M. Iavarone,
J. Knobloch,
T. Kubo,
W. K. Kwok,
R. Laxdal
, et al. (31 additional authors not shown)
Abstract:
Radio frequency superconductivity is a cornerstone technology for many future HEP particle accelerators and experiments from colliders to proton drivers for neutrino facilities to searches for dark matter. While the performance of superconducting RF (SRF) cavities has improved significantly over the last decades, and the SRF technology has enabled new applications, the proposed HEP facilities and…
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Radio frequency superconductivity is a cornerstone technology for many future HEP particle accelerators and experiments from colliders to proton drivers for neutrino facilities to searches for dark matter. While the performance of superconducting RF (SRF) cavities has improved significantly over the last decades, and the SRF technology has enabled new applications, the proposed HEP facilities and experiments pose new challenges. To address these challenges, the field continues to generate new ideas and there seems to be a vast room for improvements. In this paper we discuss the key research directions that are aligned with and address the future HEP needs.
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Submitted 21 August, 2022; v1 submitted 3 April, 2022;
originally announced April 2022.
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An Impartial Perspective for Superconducting Nb3Sn coated Copper RF Cavities for Future Accelerators
Authors:
E. Barzi,
B. C. Barish,
R. A. Rimmer,
A. Valente-Feliciano,
C. M. Rey,
W. A. Barletta,
E. Nanni,
M. Nasr,
M. Ross,
M. Schneider,
S. Tantawi,
P. B. Welander,
E. I. Simakov,
I. O. Usov,
L. Alff,
N. Karabas,
M. Major,
J. P. Palakkal,
S. Petzold,
N. Pietralla,
N. Schäfer,
A. Kikuchi,
H. Hayano,
H. Ito,
S. Kashiwaji
, et al. (10 additional authors not shown)
Abstract:
This Snowmass21 Contributed Paper encourages the Particle Physics community in fostering R&D in Superconducting Nb3Sn coated Copper RF Cavities instead of costly bulk Niobium. It describes the pressing need to devote effort in this direction, which would deliver higher gradient and higher temperature of operation and reduce the overall capital and operational costs of any future collider. It is un…
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This Snowmass21 Contributed Paper encourages the Particle Physics community in fostering R&D in Superconducting Nb3Sn coated Copper RF Cavities instead of costly bulk Niobium. It describes the pressing need to devote effort in this direction, which would deliver higher gradient and higher temperature of operation and reduce the overall capital and operational costs of any future collider. It is unlikely that an ILC will be built in the next ten years with Nb as one of the main cost drivers of SRFs. This paper provides strong arguments on the benefits of using this time for R&D on producing Nb3Sn on inexpensive and thermally efficient metals such as Cu or bronze, while pursuing in parallel the novel U.S. concept of parallel-feed RF accelerator structures. A technology that synergistically uses both of these advanced tools would make an ILC or equivalent machines more affordable and more likely to be built. Such a successful enterprise would readily apply to other HEP accelerators, for instance a Muon Collider, and to accelerators beyond HEP. We present and assess current efforts in the U.S. on the novel concept of parallel-feed RF accelerator structures, and in the U.S. and abroad in producing Nb3Sn films on either Cu or bronze despite minimal funding.
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Submitted 26 March, 2022; v1 submitted 17 March, 2022;
originally announced March 2022.
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Nb3Sn multicell cavity coating system at JLAB
Authors:
G. Eremeev,
W. Clemens,
K. Macha,
C. E. Reece,
A. M. Valente-Feliciano,
S. Williams,
U. Pudasaini,
M. Kelley
Abstract:
SRF niobium cavities are the building blocks of modern accelerators for scientific applications. Lower surface resistance, higher fields, and high operating temperatures advance the reach of the future accelerators for scientific discovery as well as potentially enabling cost-effective industrial solutions. We describe the design and performance of an Nb$_{3}$Sn coating system that converts the in…
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SRF niobium cavities are the building blocks of modern accelerators for scientific applications. Lower surface resistance, higher fields, and high operating temperatures advance the reach of the future accelerators for scientific discovery as well as potentially enabling cost-effective industrial solutions. We describe the design and performance of an Nb$_{3}$Sn coating system that converts the inner surface of niobium cavities to Nb$_{3}$Sn film. Niobium surface, heated by radiation from the niobium retort, is exposed to Sn and SnCl$_{2}$ vapor during the heat cycle, which results in about 2 $μ$m Nb$_{3}$Sn film on the niobium surface. Film composition and structure as well as RF properties with 1-cell R\&D cavities and 5-cell practical accelerator cavities are presented.
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Submitted 11 January, 2020;
originally announced January 2020.
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Cryogenic rf test of the first plasma etched SRF cavity
Authors:
J. Upadhyay,
A. Palczewski,
S. Popović,
A. -M. Valente-Feliciano,
D. Im,
L. Phillips,
L. Vušković
Abstract:
Plasma etching has a potential to be an alternative processing technology for superconducting radio frequency (SRF) cavities. An apparatus and a method are developed for plasma etching of the inner surfaces of SRF cavities. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity is used. The single cell cavity is mechanically polished, buffer chemic…
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Plasma etching has a potential to be an alternative processing technology for superconducting radio frequency (SRF) cavities. An apparatus and a method are developed for plasma etching of the inner surfaces of SRF cavities. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity is used. The single cell cavity is mechanically polished, buffer chemically etched afterwards and rf tested at cryogenic temperatures for a baseline test. This cavity is then plasma processed. The processing was accomplished by moving axially the inner electrode and the gas flow inlet in a step-wise manner to establish segmented plasma processing. The cavity is rf tested afterwards at cryogenic temperatures. The rf test and surface condition results are presented.
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Submitted 20 May, 2016;
originally announced May 2016.
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Apparatus and method for plasma processing of SRF cavities
Authors:
J. Upadhyay,
Do Im,
J. Peshl,
M. Bašović,
S. Popović,
A. -M. Valente-Feliciano,
L. Phillips,
L. Vuškovića
Abstract:
An apparatus and a method are described for plasma etching of the inner surface of superconducting radio frequency (SRF) cavities. Accelerator SRF cavities are formed into a variable-diameter cylindrical structure made of bulk niobium, for resonant generation of the particle accelerating field. The etch rate non-uniformity due to depletion of the radicals has been overcome by the simultaneous move…
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An apparatus and a method are described for plasma etching of the inner surface of superconducting radio frequency (SRF) cavities. Accelerator SRF cavities are formed into a variable-diameter cylindrical structure made of bulk niobium, for resonant generation of the particle accelerating field. The etch rate non-uniformity due to depletion of the radicals has been overcome by the simultaneous movement of the gas flow inlet and the inner electrode. An effective shape of the inner electrode to reduce the plasma asymmetry for the coaxial cylindrical rf plasma reactor is determined and implemented in the cavity processing method. The processing was accomplished by moving axially the inner electrode and the gas flow inlet in a step-wise way to establish segmented plasma columns. The test structure was a pillbox cavity made of steel of similar dimension to the standard SRF cavity. This was adopted to experimentally verify the plasma surface reaction on cylindrical structures with variable diameter using the segmented plasma generation approach. The pill box cavity is filled with niobium ring- and disk-type samples and the etch rate of these samples was measured.
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Submitted 13 November, 2015;
originally announced November 2015.
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Reversal of the Asymmetry in a Cylindrical Coaxial Capacitively Coupled Ar/Cl2 Plasma
Authors:
J. Upadhyay,
Do Im,
S. Popović,
A. -M. Valente-Feliciano,
L. Phillips,
L. Vušković
Abstract:
The reduction of the asymmetry in the plasma sheath voltages of a cylindrical coaxial capacitively coupled plasma is crucial for efficient surface modification of the inner surfaces of concave three-dimensional structures, including superconducting radio frequency cavities. One critical asymmetry effect is the negative dc self-bias, formed across the inner electrode plasma sheath due to its lower…
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The reduction of the asymmetry in the plasma sheath voltages of a cylindrical coaxial capacitively coupled plasma is crucial for efficient surface modification of the inner surfaces of concave three-dimensional structures, including superconducting radio frequency cavities. One critical asymmetry effect is the negative dc self-bias, formed across the inner electrode plasma sheath due to its lower surface area compared to the outer electrode. The effect on the self-bias potential with the surface enhancement by geometric modification on the inner electrode structure is studied. The shapes of the inner electrodes are chosen as cylindrical tube, large and small pitch bellows, and disc-loaded corrugated structure (DLCS). The dc self-bias measurements for all these shapes were taken at different process parameters in Ar/Cl2 discharge. The reversal of the negative dc self-bias potential to become positive for a DLCS inner electrode was observed and the best etch rate is achieved due to the reduction in plasma asymmetry.
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Submitted 30 June, 2015;
originally announced July 2015.
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Self-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled Plasma
Authors:
J. Upadhyay,
Do Im,
S. Popović,
A. -M. Valente-Feliciano,
L. Phillips,
L. Vušković
Abstract:
An rf coaxial capacitively coupled Ar/Cl2 plasma is applied to processing the inner wall of superconducting radio frequency cavities. A dc self-bias potential is established across the inner electrode sheath due to the surface area difference between inner and outer electrodes of the coaxial plasma. The self-bias potential measurement is used as an indication of the plasma sheath voltage asymmetry…
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An rf coaxial capacitively coupled Ar/Cl2 plasma is applied to processing the inner wall of superconducting radio frequency cavities. A dc self-bias potential is established across the inner electrode sheath due to the surface area difference between inner and outer electrodes of the coaxial plasma. The self-bias potential measurement is used as an indication of the plasma sheath voltage asymmetry. The understanding of the asymmetry in sheath voltage distribution in coaxial plasma is important for the modification of the inner surfaces of three dimensional objects. The plasma sheath voltages were tailored to process the outer wall by providing an additional dc current to the inner electrode with the help of an external dc power supply. The dc self-bias potential is measured for different diameter electrodes and its variation on process parameters such as gas pressure, rf power and percentage of chlorine in the Ar/Cl2 gas mixture is studied. The dc current needed to overcome the self-bias potential to make it zero is measured for the same process parameters.
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Submitted 16 June, 2015;
originally announced June 2015.
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Etching Mechanism of Niobium in Coaxial Ar/Cl2 RF Plasma
Authors:
J. Upadhyay,
Do Im,
S. Popović,
A. -M. Valente-Feliciano,
L. Phillips,
L. Vušković
Abstract:
The understanding of the Ar/Cl2 plasma etching mechanism is crucial for the desired modification of inner surface of the three dimensional niobium (Nb) superconductive radio frequency cavities. Uniform mass removal in cylindrical shaped structures is a challenging task, because the etch rate varies along the direction of gas flow. The study is performed in the asymmetric coaxial RF discharge with…
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The understanding of the Ar/Cl2 plasma etching mechanism is crucial for the desired modification of inner surface of the three dimensional niobium (Nb) superconductive radio frequency cavities. Uniform mass removal in cylindrical shaped structures is a challenging task, because the etch rate varies along the direction of gas flow. The study is performed in the asymmetric coaxial RF discharge with two identical Nb rings acting as a part of the outer electrode. The dependence of etch rate uniformity on pressure, RF power, DC bias, Cl2 concentration, diameter of the inner electrode, temperature of the outer cylinder and position of the samples in the structure is determined. To understand the plasma etching mechanisms, we have studied several factors that have important influence on the etch rate and uniformity, which include the plasma sheath potential, Nb surface temperature, and the gas flow rate.
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Submitted 1 November, 2014;
originally announced November 2014.
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Plasma Processing of Large Curved Surfaces for SRF Cavity Modification
Authors:
J. Upadhyay,
Do Im,
S. Popović,
A. -M. Valente-Feliciano,
L. Phillips,
L. Vušković
Abstract:
Plasma based surface modification of niobium is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. The development of the technology based on Cl2/Ar plasma etching has to address several crucial parameters which influence the etching rate and surface roughness, and eventually, determine cavity performance. This includes dependence of the process on the freque…
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Plasma based surface modification of niobium is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. The development of the technology based on Cl2/Ar plasma etching has to address several crucial parameters which influence the etching rate and surface roughness, and eventually, determine cavity performance. This includes dependence of the process on the frequency of the RF generator, gas pressure, power level, the driven (inner) electrode configuration, and the chlorine concentration in the gas mixture during plasma processing. To demonstrate surface layer removal in the asymmetric non-planar geometry, we are using a simple cylindrical cavity with 8 ports symmetrically distributed over the cylinder. The ports are used for diagnosing the plasma parameters and as holders for the samples to be etched. The etching rate is highly correlated with the shape of the inner electrode, radio-frequency (RF) circuit elements, chlorine concentration in the Cl2/Ar gas mixtures, residence time of reactive species and temperature of the cavity. Using cylindrical electrodes with variable radius, large-surface ring-shaped samples and d.c. bias implementation in the external circuit we have demonstrated substantial average etching rates and outlined the possibility to optimize plasma properties with respect to maximum surface processing effect.
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Submitted 1 November, 2014;
originally announced November 2014.
