Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source
Authors:
Getnet K. Tadesse,
Wilhelm Eschen,
Robert Klas,
Maxim Tschernajew,
Frederik Tuitje,
Michael Steinert,
Matthias Zilk,
Vittoria Schuster,
Thomas Pertsch,
Christian Spielmann,
Jens Limpert,
Jan Rothhardt
Abstract:
Ptychography enables coherent diffractive imaging (CDI) of extended samples by raster scanning across the illuminating XUV/X-ray beam thereby generalizing the unique advantages of CDI techniques. Table-top realizations of this method are urgently needed for many applications in sciences and industry. Previously, it was only possible to image features much larger than the illuminating wavelength wi…
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Ptychography enables coherent diffractive imaging (CDI) of extended samples by raster scanning across the illuminating XUV/X-ray beam thereby generalizing the unique advantages of CDI techniques. Table-top realizations of this method are urgently needed for many applications in sciences and industry. Previously, it was only possible to image features much larger than the illuminating wavelength with table-top ptychography although knife-edge tests suggested sub-wavelength resolution. However, most real-world imaging applications require resolving of the smallest and closely-spaced features of a sample in an extended field of view. In this work, we resolve features as small as 2.5 λ(45 nm) by using a table-top ptychography setup and a high-order harmonic XUV source. For the first time, a Rayleigh-type criterion is used as a direct and unambiguous resolution metric for high-resolution table-top setup. This reliably qualifies this imaging system for real-world applications e.g. in biological sciences, material sciences, imaging integrated circuits and semiconductor mask inspection.
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Submitted 24 May, 2018;
originally announced May 2018.
Table-Top Milliwatt-Class Extreme Ultraviolet High Harmonic Light Source
Authors:
Robert Klas,
Stefan Demmler,
Maxim Tschernajew,
Steffen Hädrich,
Yariv Shamir,
Andreas Tünnermann,
Jan Rothhardt,
Jens Limpert
Abstract:
Extreme ultraviolet (XUV) lasers are essential for the investigation of fundamental physics. Especially high repetition rate, high photon flux sources are of major interest for reducing acquisition times and improving signal to noise ratios in a plethora of applications. Here, an XUV source based on cascaded frequency conversion is presented, which delivers due to the drastic better single atom re…
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Extreme ultraviolet (XUV) lasers are essential for the investigation of fundamental physics. Especially high repetition rate, high photon flux sources are of major interest for reducing acquisition times and improving signal to noise ratios in a plethora of applications. Here, an XUV source based on cascaded frequency conversion is presented, which delivers due to the drastic better single atom response for short wavelength drivers, an average output power of (832 +- 204) μW at 21.7 eV. This is the highest average power produced by any HHG source in this spectral range surpassing precious demonstrations by more than a factor of four. Furthermore, a narrow-band harmonic at 26.6 eV with a relative energy bandwidth of only ΔE/E= 1.8 x 10E-3 has been generated, which is of high interest for high precision spectroscopy experiments.
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Submitted 11 July, 2016;
originally announced July 2016.
