Showing 1–1 of 1 results for author: Stetzkamp, C L

Electric field measurements on the INCA discharge

Authors: Christian Lütke Stetzkamp, Tsanko V. Tsankov, Uwe Czarnetzki

Abstract: Developing large-area inductively coupled plasma sources requires deviation from the standard coil concepts and the development of advanced antenna designs. First steps in this direction employ periodic array structures. A recent example is the Inductively Coupled Array (INCA) discharge, where use is made of the collisionless electron heating in the electric field of a periodic array of vortex fie… ▽ More Developing large-area inductively coupled plasma sources requires deviation from the standard coil concepts and the development of advanced antenna designs. First steps in this direction employ periodic array structures. A recent example is the Inductively Coupled Array (INCA) discharge, where use is made of the collisionless electron heating in the electric field of a periodic array of vortex fields. Naturally, the efficiency of such discharges depends on the how well the experimental array realizes the theoretically prescribed field design. In this work two diagnostic methods are employed to measure the field structure of the INCA discharge. Ex situ B-dot probe measurements are compared to in situ radio-frequency modulation spectroscopy (RFMOS) and good agreement be tween their results is observed. Both diagnostics show systematic deviations of the experimentally generated field structure from the one employed in the theoretical description of the INCA discharge. The subtleties in applying both diagnostic methods together with an analysis of the possible consequences of the non-ideal electric field configuration and ways to improve it are discussed. △ Less

Submitted 28 June, 2021; originally announced June 2021.