Actuation and mapping of SAW-induced high-frequency wavefields on suspended graphene membranes
Authors:
Hande N. Açıkgöz,
Dong Hoon Shin,
Inge C. van der Knijff,
Allard J. Katan,
Xiliang Yang,
Peter G. Steeneken,
Gerard J. Verbiest,
Sabina Caneva
Abstract:
High frequency acoustic devices based on two-dimensional (2D) materials are unique platforms to design and manipulate the spatiotemporal response of acoustic waves for next-generation sensing and contactless actuation applications. Conventional methods for actuating suspended membranes, however, cannot be applied to all 2D materials, or are limited in frequency. There is, therefore, a need for a u…
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High frequency acoustic devices based on two-dimensional (2D) materials are unique platforms to design and manipulate the spatiotemporal response of acoustic waves for next-generation sensing and contactless actuation applications. Conventional methods for actuating suspended membranes, however, cannot be applied to all 2D materials, or are limited in frequency. There is, therefore, a need for a universal high-frequency, on-chip actuation technique that can be applied to all types of membranes. Here, we demonstrate that surface acoustic waves (SAWs) can be used to efficiently actuate suspended 2D materials by exciting suspended graphene membranes with high-frequency (375 MHz) Rayleigh surface waves and mapping the resulting vibration field with atomic force acoustic microscopy (AFAM). Acoustic waves travelling from supported to suspended graphene experience a reduction in acoustic wavelength from 10 μm to ~2 μum due to the decrease in effective bending rigidity, leading to a decrease in wave velocity on suspended graphene. By varying the excitation frequency, we observed a change in phase velocity from ~160 m/s to ~700 m/s. This behavior is consistent with the nonlinear dispersion of acoustic waves, as predicted by plate theory, in suspended graphene membranes. The geometry and bending rigidity of the membrane thus play key roles in modulating the acoustic wave pattern and wavelength. This combined SAW actuation and AFAM visualization scheme can give new insights into the fundamentals of acoustic transport at the nanoscale limit and provides a route towards the manipulation of localized wavefields for on-chip patterning and transport over 2D materials surfaces.
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Submitted 24 December, 2024;
originally announced December 2024.
Self-sealing complex oxide resonators
Authors:
Martin Lee,
Martin Robin,
Ruben Guis,
Ulderico Filippozzi,
Dong Hoon Shin,
Thierry C. van Thiel,
Stijn Paardekooper,
Johannes R. Renshof,
Herre S. J. van der Zant,
Andrea D. Caviglia,
Gerard J. Verbiest,
Peter G. Steeneken
Abstract:
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressu…
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Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressure sensors to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nano-mechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices for 15 minutes. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. We confirm the enhancement of adhesion by picosecond ultrasonics measurements which show an increase in the interfacial stiffness by 70% after annealing. Since it is straigthforward to apply, the presented self-sealing method is thus a promising route toward realizing ultrathin hermetic pressure sensors.
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Submitted 8 September, 2021;
originally announced September 2021.
