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Tutorial on Silicon Photonics Integrated Platform Fiber Edge Coupling
Authors:
Sergey S. Avdeev,
Aleksandr S. Baburin,
Evgeniy V. Sergeev,
Alexei B. Kramarenko,
Arseniy V. Belyaev,
Danil V. Kushnev,
Kirill A. Buzaverov,
Ilya A. Stepanov,
Vladimir V. Echeistov,
Sergey V. Bukatin,
Ali Sh. Amiraslanov,
Evgeniy S. Lotkov,
Dmitriy A. Baklykov,
Ilya A. Rodionov
Abstract:
Photonic integrated circuits (PICs) play a crucial role in almost every aspect of modern life, such as data storage, telecommunications, medical diagnostics, green energy, autonomous driving, agriculture, and high-performance computing. To fully harness their benefits, an efficient coupling mechanism is required to successfully launch light into waveguides from fibers. This study introduces low-lo…
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Photonic integrated circuits (PICs) play a crucial role in almost every aspect of modern life, such as data storage, telecommunications, medical diagnostics, green energy, autonomous driving, agriculture, and high-performance computing. To fully harness their benefits, an efficient coupling mechanism is required to successfully launch light into waveguides from fibers. This study introduces low-loss coupling strategies and their implementation for a silicon nitride integrated platform. Here we present an overview of coupling technologies, optimized designs, and a tutorial on manufacturing techniques for inverted tapers, which enable effective coupling for both transverse-magnetic and transverse-electric modes. The optimized coupling losses for the UHNA-7 fiber and the inverted taper Si3N4 coupler reached -0.15 dB at 1550 nm per connection for single-mode waveguides with 220x1200 nm cross section. The measured coupling losses in the inverted taper coupler with a standard single-mode fiber were -1.50 dB at 1550 nm per connection for the same platform.
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Submitted 17 September, 2024; v1 submitted 20 May, 2024;
originally announced May 2024.
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Silicon nitride integrated photonics from visible to mid-infrared spectra
Authors:
Kirill A. Buzaverov,
Aleksandr S. Baburin,
Evgeny V. Sergeev,
Sergey S. Avdeev,
Evgeniy S. Lotkov,
Sergey V. Bukatin,
Ilya A. Stepanov,
Aleksey B. Kramarenko,
Ali Sh. Amiraslanov,
Danil V. Kushnev,
Ilya A. Ryzhikov,
Ilya A. Rodionov
Abstract:
Recently, silicon nitride (Si3N4) photonic integrated circuits (PICs) are of a great interest due to their extremely low waveguides losses. The number of Si3N4 integrated photonics platform applications is constantly growing including the Internet of Things (IoT), artificial intelligence (AI), light detection and ranging (LiDAR) devices, hybrid neuromorphic and quantum computing. Their heterogeneo…
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Recently, silicon nitride (Si3N4) photonic integrated circuits (PICs) are of a great interest due to their extremely low waveguides losses. The number of Si3N4 integrated photonics platform applications is constantly growing including the Internet of Things (IoT), artificial intelligence (AI), light detection and ranging (LiDAR) devices, hybrid neuromorphic and quantum computing. Their heterogeneous integration with a III-V platform leads to a new advanced large scale PICs with thousands of elements. Here, we review key trends in Si3N4 integrated circuits technology and fill an information gap in the field of state-of-the-art photonic devices operating from visible to mid-infrared spectra. A comprehensive overview of Si3N4 integrared circtuis microfabrication process details (deposition, lithography, etching, etc.) is introduced. Finally, we point out the limits and challenges of silicon nitride photonics performance in an ultrawide range providing routes and prospects for their future scaling and optimization.
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Submitted 16 May, 2024;
originally announced May 2024.
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Low-loss silicon nitride photonic ICs for single-photon applications
Authors:
Kirill A. Buzaverov,
Aleksandr S. Baburin,
Evgeny V. Sergeev,
Sergey S. Avdeev,
Evgeniy S. Lotkov,
Mihail Andronik,
Victoria E. Stukalova,
Dmitry A. Baklykov,
Ivan V. Dyakonov,
Nikolay N. Skryabin,
Mikhail Yu. Saygin,
Sergey P. Kulik,
Ilya A. Ryzhikov,
Ilya A. Rodionov
Abstract:
Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology targeting C-band application is well established across multi-project wafer (MPW) fabs, whereas near-infrared (NIR) PICs suitable for the state-of-the-art single-photon sources are still underdeveloped. Here, we report…
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Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology targeting C-band application is well established across multi-project wafer (MPW) fabs, whereas near-infrared (NIR) PICs suitable for the state-of-the-art single-photon sources are still underdeveloped. Here, we report the labs-scale process optimization and optical characterization of low-loss tunable photonic integrated circuits for single-photon applications. We demonstrate the lowest propagation losses to the date (as low as 0.55 dB/cm at 925 nm wavelength) in single-mode silicon nitride submicron waveguides (220x550 nm). This performance is achieved due to advanced e-beam lithography and inductively coupled plasma reactive ion etching steps which yields waveguides vertical sidewalls with down to 0.85 nm sidewall roughness. These results provide a chip-scale low-loss PIC platform that could be even further improved with high quality SiO2 cladding, chemical-mechanical polishing and multistep annealing for extra-strict single-photon applications.
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Submitted 28 October, 2022;
originally announced October 2022.
