Self-sealing complex oxide resonators
Authors:
Martin Lee,
Martin Robin,
Ruben Guis,
Ulderico Filippozzi,
Dong Hoon Shin,
Thierry C. van Thiel,
Stijn Paardekooper,
Johannes R. Renshof,
Herre S. J. van der Zant,
Andrea D. Caviglia,
Gerard J. Verbiest,
Peter G. Steeneken
Abstract:
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressu…
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Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressure sensors to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nano-mechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices for 15 minutes. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. We confirm the enhancement of adhesion by picosecond ultrasonics measurements which show an increase in the interfacial stiffness by 70% after annealing. Since it is straigthforward to apply, the presented self-sealing method is thus a promising route toward realizing ultrathin hermetic pressure sensors.
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Submitted 8 September, 2021;
originally announced September 2021.
Sensitive capacitive pressure sensors based on graphene membrane arrays
Authors:
Makars Šiškins,
Martin Lee,
Dominique Wehenkel,
Richard van Rijn,
Tijmen W. de Jong,
Johannes R. Renshof,
Berend C. Hopman,
Willemijn S. J. M. Peters,
Dejan Davidovikj,
Herre S. J. van der Zant,
Peter G. Steeneken
Abstract:
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly…
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The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature anneals. These sensors are readout using a low cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa$^{-1}$ mm$^{-2}$, thereby outperforming commercial sensors.
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Submitted 19 March, 2020;
originally announced March 2020.
