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High-uniformity TiN/Ti/TiN multilayers for the development of Microwave Kinetic Inductance Detector
Abstract: Microwave Kinetic Inductance Detectors (MKIDs) are a class of superconducting cryogenic detectors that simultaneously exhibit energy resolution, time resolution and spatial resolution. The pixel yield of MKID arrays is usually a critical figure of merit in the characterisation of an MKIDs array. Currently, for MKIDs intended for the detection of optical and near-infrared photons, only the best arr… ▽ More
Submitted 19 January, 2023; v1 submitted 18 January, 2023; originally announced January 2023.
Comments: 11 pages, 7 figures. Proceedings Volume 12191, X-Ray, Optical, and Infrared Detectors for Astronomy X; 1219105 (2022) [REPLACEMENT is to correct typo in arxiv metadata]
Journal ref: Proc. SPIE 12191, X-Ray, Optical, and Infrared Detectors for Astronomy X, 1219105 (29 August 2022)