Showing 1–1 of 1 results for author: Pachiu, C

Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond

Authors: C. Pachiu, T. Sandu, C. Tibeica, L. M. Veca, R. Popa, M. Popescu, R. Gavrila, C. Popov, V. Avramescu

Abstract: The fabrication of various suspended microstructures made from ultra-nanocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in th… ▽ More The fabrication of various suspended microstructures made from ultra-nanocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in the ultra-nanocrystalline diamond film. △ Less

Submitted 4 November, 2021; originally announced November 2021.

Comments: 13 pages, 11 figures

Journal ref: Romanian Journal of Information Science and Technology Volume 21, Number 1, 2018, 49-60