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3D surface profiling via photonic integrated geometric sensor
Authors:
Ziyao Zhang,
Yizhi Wang,
Chunhui Yao,
Huiyu Huang,
Rui Ma,
Xin Du,
Wanlu Zhang,
Zhitian Shi,
Minjia Chen,
Ting Yan,
Liang Ming,
Yuxiao Ye,
Richard Penty,
Qixiang Cheng
Abstract:
Measurements of microscale surface patterns are essential for process and quality control in industries across semiconductors, micro-machining, and biomedicines. However, the development of miniaturized and intelligent profiling systems remains a longstanding challenge, primarily due to the complexity and bulkiness of existing benchtop systems required to scan large-area samples. A real-time, in-s…
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Measurements of microscale surface patterns are essential for process and quality control in industries across semiconductors, micro-machining, and biomedicines. However, the development of miniaturized and intelligent profiling systems remains a longstanding challenge, primarily due to the complexity and bulkiness of existing benchtop systems required to scan large-area samples. A real-time, in-situ, and fast detection alternative is therefore highly desirable for predicting surface topography on the fly. In this paper, we present an ultracompact geometric profiler based on photonic integrated circuits, which directly encodes the optical reflectance of the sample and decodes it with a neural network. This platform is free of complex interferometric configurations and avoids time-consuming nonlinear fitting algorithms. We show that a silicon programmable circuit can generate pseudo-random kernels to project input data into higher dimensions, enabling efficient feature extraction via a lightweight one-dimensional convolutional neural network. Our device is capable of high-fidelity, fast-scanning-rate thickness identification for both smoothly varying samples and intricate 3D printed emblem structures, paving the way for a new class of compact geometric sensors.
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Submitted 29 June, 2025;
originally announced June 2025.
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Optical Convolutional Spectrometer
Authors:
Chunhui Yao,
Jie Ma,
Ningning Wang,
Peng Bao,
Wei Zhuo,
Tao Zhang,
Wanlu Zhang,
Kangning Xu,
Ting Yan,
Liang Ming,
Yuxiao Ye,
Tawfique Hasan,
Ian White,
Richard Penty,
Qixiang Cheng
Abstract:
Optical spectrometers are fundamental across numerous disciplines in science and technology. However, miniaturized versions, while essential for in situ measurements, are often restricted to coarse identification of signature peaks and inadequate for metrological purposes. Here, we introduce a new class of spectrometer, leveraging the convolution theorem as its mathematical foundation. Our convolu…
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Optical spectrometers are fundamental across numerous disciplines in science and technology. However, miniaturized versions, while essential for in situ measurements, are often restricted to coarse identification of signature peaks and inadequate for metrological purposes. Here, we introduce a new class of spectrometer, leveraging the convolution theorem as its mathematical foundation. Our convolutional spectrometer offers unmatched performance for miniaturized systems and distinct structural and computational simplicity, featuring a centimeter-scale footprint for the fully packaged unit, low cost (~$10) and a 2400 cm-1 (approximately 500 nm) bandwidth. We achieve excellent precision in resolving complex spectra with sub-second sampling and processing time, demonstrating a wide range of applications from industrial and agricultural analysis to healthcare monitoring. Specifically, our spectrometer system classifies diverse solid samples, including plastics, pharmaceuticals, coffee, flour and tea, with 100% success rate, and quantifies concentrations of aqueous and organic solutions with detection accuracy surpassing commercial benchtop spectrometers. We also realize the non-invasive sensing of human biomarkers, such as skin moisture (mean absolute error; MAE = 2.49%), blood alcohol (1.70 mg/dL), blood lactate (0.81 mmol/L), and blood glucose (0.36 mmol/L), highlighting the potential of this new class of spectrometers for low-cost, high-precision, portable/wearable spectral metrology.
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Submitted 12 February, 2025;
originally announced February 2025.
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Chip-scale sensor for spectroscopic metrology
Authors:
Chunhui Yao,
Wanlu Zhang,
Peng Bao,
Jie Ma,
Wei Zhuo,
Minjia Chen,
Zhitian Shi,
Jingwen Zhou,
Yuxiao Ye,
Liang Ming,
Ting Yan,
Richard Penty,
Qixiang Cheng
Abstract:
Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for t…
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Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for the coarse identification of signature peaks. In this paper, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution of less than 8 pm, which translates into a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of the commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.
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Submitted 14 September, 2024; v1 submitted 25 July, 2024;
originally announced July 2024.
