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Resolution Limits of Resonant Sensors with Duffing Non-Linearity
Authors:
Tomás Manzaneque,
Murali K. Ghatkesar,
Farbod Alijani,
Minxing Xu,
Richard A. Norte,
Peter G. Steeneken
Abstract:
The resolution of resonant sensors is fundamentally limited by the presence of noise. Thermomechanical noise, intrinsic to the resonator, sets the ultimate sensor performance when all other noise sources have been eliminated. For linear resonators, the sensing resolution can always be further improved by increasing the driving power. However, this trend cannot continue indefinitely, since at suffi…
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The resolution of resonant sensors is fundamentally limited by the presence of noise. Thermomechanical noise, intrinsic to the resonator, sets the ultimate sensor performance when all other noise sources have been eliminated. For linear resonators, the sensing resolution can always be further improved by increasing the driving power. However, this trend cannot continue indefinitely, since at sufficiently high driving powers non-linear effects emerge and influence the noise performance. As a consequence, the resonator's non-linear characteristics play an inextricable role in determining its ultimate resolution limits. Recently, several works have studied the characteristic performance of non-linear resonators as sensors, with the counter intuitive conclusion that increasing the quality factor of a resonator does not improve its sensing resolution at the thermomechanical limit. In this work we further analyze the ultimate resolution limits, and describe different regimes of performance at integration times below and above the resonator's decay time. We provide an analytical model to elucidate the effects of Duffing non-linearity on the resolution of closed-loop sensors, and validate it using numerical simulations. In contrast to previous works, our model and simulations show that under certain conditions the ultimate sensing resolution of a Duffing resonator can be improved by maximizing its quality factor. With measurements on a nanomechanical membrane resonator, we experimentally verify the model and demonstrate that frequency resolutions can be achieved that surpass the previously known limits.
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Submitted 24 May, 2022;
originally announced May 2022.
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Method to Determine the Closed-Loop Precision of Resonant Sensors from Open-Loop Measurements
Authors:
Tomás Manzaneque,
Peter G. Steeneken,
Farbod Alijani,
Murali K. Ghatkesar
Abstract:
Resonant sensors determine a sensed parameter by measuring the resonance frequency of a resonator. For fast continuous sensing, it is desirable to operate resonant sensors in a closed-loop configuration, where a feedback loop ensures that the resonator is always actuated near its resonance frequency, so that the precision is maximized even in the presence of drifts or fluctuations of the resonance…
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Resonant sensors determine a sensed parameter by measuring the resonance frequency of a resonator. For fast continuous sensing, it is desirable to operate resonant sensors in a closed-loop configuration, where a feedback loop ensures that the resonator is always actuated near its resonance frequency, so that the precision is maximized even in the presence of drifts or fluctuations of the resonance frequency. However, in a closed-loop configuration, the precision is not only determined by the resonator itself, but also by the feedback loop, even if the feedback circuit is noiseless. Therefore, to characterize the intrinsic precision of resonant sensors, the open-loop configuration is often employed. To link these measurements to the actual closed-loop performance of the resonator, it is desirable to have a relation that determines the closed-loop precision of the resonator from open-loop characterisation data. In this work, we present a methodology to estimate the closed-loop resonant sensor precision by relying only on an open-loop characterization of the resonator. The procedure is beneficial for fast performance estimation and benchmarking of resonant sensors, because it does not require actual closed-loop sensor operation, thus being independent on the particular implementation of the feedback loop. We validate the methodology experimentally by determining the closed-loop precision of a mechanical resonator from an open-loop measurement and comparing this to an actual closed-loop measurement.
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Submitted 5 August, 2020; v1 submitted 3 July, 2020;
originally announced July 2020.
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Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
Authors:
Yansong Yang,
Ruochen Lu,
Tomas Manzaneque,
Songbin Gong
Abstract:
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an elect…
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This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an electromechanical coupling (kt2) of 1.5% and 0.94% and extracted mechanical Qs of 406 and 474 for A5 and A7 respectively. The quality factors are the highest reported for piezoelectric MEMS resonators operating at this frequency range. The demonstrated performance has shown the strong potential of LiNbO3 asymmetric mode devices to meet the front-end filtering requirements of 5G.
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Submitted 28 May, 2018;
originally announced May 2018.
