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Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering
Authors:
Fu-Der Chen,
Ankita Sharma,
Tianyuan Xue,
Youngho Jung,
Alperen Govdeli,
Jason C. C. Mak,
Homeira Moradi Chameh,
Mandana Movahed,
Michael G. K. Brunk,
Xianshu Luo,
Hongyao Chua,
Patrick Guo-Qiang Lo,
Taufik A Valiante,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
In brain activity mapping experiments using optogenetics, patterned illumination is crucial for deterministic and localized stimulation of neurons. However, due to optical scattering in brain tissue, light-emitting implantable devices are needed to bring precise patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that fo…
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In brain activity mapping experiments using optogenetics, patterned illumination is crucial for deterministic and localized stimulation of neurons. However, due to optical scattering in brain tissue, light-emitting implantable devices are needed to bring precise patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that form tailored beam emission patterns without lenses. Here, we demonstrate neural probes with grating-based light emitters that generate a single steerable light beam across $> 60\%$ of the steering range with $\ge 4$ dB of background suppression for optogenetic photostimulation. The light emitters, optimized for blue or amber light, combine end-fire optical phased arrays with slab gratings to suppress higher-order sidelobes.
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Submitted 3 April, 2024;
originally announced April 2024.
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Microcantilever-integrated photonic circuits for broadband laser beam scanning
Authors:
Saeed Sharif Azadeh,
Jason C. C. Mak,
Hong Chen,
Xianshu Luo,
Fu-Der Chen,
Hongyao Chua,
Frank Weiss,
Christopher Alexiev,
Andrei Stalmashonak,
Youngho Jung,
John N. Straguzzi,
Guo-Qiang Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint,…
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Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm$^2$ areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.
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Submitted 11 October, 2022; v1 submitted 25 July, 2022;
originally announced July 2022.
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Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform
Authors:
Yiding Lin,
Zheng Yong,
Xianshu Luo,
Saeed Sharif Azadeh,
Jared Mikkelsen,
Ankita Sharma,
Hong Chen,
Jason C. C. Mak,
Patrick G. -Q. Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visib…
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Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of > 60% across a record wavelength span from $λ$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 $\pm$ 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.
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Submitted 21 September, 2022; v1 submitted 22 March, 2022;
originally announced March 2022.
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Automatic Resonance Alignment of High-Order Microring Filters
Authors:
Jason C. C. Mak,
Wesley D. Sacher,
Tianyuan Xue,
Jared C. Mikkelsen,
Zheng Yong,
Joyce K. S. Poon
Abstract:
Automatic resonance alignment tuning is performed in high-order series coupled microring filters using a feedback system. By inputting only a reference wavelength, a filter is tuned such that passband ripples are dramatically reduced compared to the initial detuned state and the passband becomes centered at the reference. The method is tested on 5th order microring filters fabricated in a standard…
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Automatic resonance alignment tuning is performed in high-order series coupled microring filters using a feedback system. By inputting only a reference wavelength, a filter is tuned such that passband ripples are dramatically reduced compared to the initial detuned state and the passband becomes centered at the reference. The method is tested on 5th order microring filters fabricated in a standard silicon photonics foundry process. Repeatable tuning is demonstrated for filters on multiple dies from the wafer and for arbitrary reference wavelengths within the free spectral range of the microrings.
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Submitted 8 July, 2015;
originally announced July 2015.
