Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits
Authors:
Iksung Kang,
Yi Jiang,
Mirko Holler,
Manuel Guizar-Sicairos,
A. F. J. Levi,
Jeffrey Klug,
Stefan Vogt,
George Barbastathis
Abstract:
Three-dimensional inspection of nanostructures such as integrated circuits is important for security and reliability assurance. Two scanning operations are required: ptychographic to recover the complex transmissivity of the specimen; and rotation of the specimen to acquire multiple projections covering the 3D spatial frequency domain. Two types of rotational scanning are possible: tomographic and…
▽ More
Three-dimensional inspection of nanostructures such as integrated circuits is important for security and reliability assurance. Two scanning operations are required: ptychographic to recover the complex transmissivity of the specimen; and rotation of the specimen to acquire multiple projections covering the 3D spatial frequency domain. Two types of rotational scanning are possible: tomographic and laminographic. For flat, extended samples, for which the full 180 degree coverage is not possible, the latter is preferable because it provides better coverage of the 3D spatial frequency domain compared to limited-angle tomography. It is also because the amount of attenuation through the sample is approximately the same for all projections. However, both techniques are time consuming because of extensive acquisition and computation time. Here, we demonstrate the acceleration of ptycho-laminographic reconstruction of integrated circuits with 16-times fewer angular samples and 4.67-times faster computation by using a physics-regularized deep self-supervised learning architecture. We check the fidelity of our reconstruction against a densely sampled reconstruction that uses full scanning and no learning. As already reported elsewhere [Zhou and Horstmeyer, Opt. Express, 28(9), pp. 12872-12896], we observe improvement of reconstruction quality even over the densely sampled reconstruction, due to the ability of the self-supervised learning kernel to fill the missing cone.
△ Less
Submitted 10 April, 2023;
originally announced April 2023.
Design of resonators using materials with negative refractive index
Authors:
Petra Schmidt,
Ilya Grigorenko,
A. F. J. Levi
Abstract:
By optimizing the design we show that inhomogeneous electromagnetic resonators with almost uniform field intensity and up to twice the energy density of conventional structures are possible by exploiting the properties of negative refractive index materials. materials. We demonstrate that using negative refractive index materials it is possible to make full width at half maximum (FWHM) of the tr…
▽ More
By optimizing the design we show that inhomogeneous electromagnetic resonators with almost uniform field intensity and up to twice the energy density of conventional structures are possible by exploiting the properties of negative refractive index materials. materials. We demonstrate that using negative refractive index materials it is possible to make full width at half maximum (FWHM) of the transmission coefficient independent from cavity length L.
△ Less
Submitted 6 May, 2008;
originally announced May 2008.
