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Vacuum-compatible photon-counting hybrid pixel detector for wide-angle X-ray scattering, X-ray diffraction and X-ray reflectometry in the tender X-ray range
Authors:
D. Skroblin,
A. Schavkan,
M. Pflüger,
N. Pilet,
B. Lüthi,
M. Krumrey
Abstract:
A vacuum-compatible photon-counting hybrid pixel detector has been installed in the ultra-high vacuum (UHV) reflectometer of the four-crystal monochromator (FCM) beamline of the Physikalisch-Technische Bundesanstalt (PTB) at the electron storage ring BESSY II in Berlin, Germany. The setup is based on the PILATUS3 100K module. The detector can be used in the entire photon energy range accessible at…
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A vacuum-compatible photon-counting hybrid pixel detector has been installed in the ultra-high vacuum (UHV) reflectometer of the four-crystal monochromator (FCM) beamline of the Physikalisch-Technische Bundesanstalt (PTB) at the electron storage ring BESSY II in Berlin, Germany. The setup is based on the PILATUS3 100K module. The detector can be used in the entire photon energy range accessible at the beamline from 1.75 to 10 keV. Complementing the already installed vacuum-compatible PILATUS 1M detector used for small-angle scattering (SAXS) and grazing incidence SAXS (GISAXS), it is possible to access larger scattering angles. The water-cooled module is located on the goniometer arm and can be positioned from -90° to 90° with respect to the incoming beam at a distance of about 200 mm from the sample. To perform absolute scattering experiments the linearity, homogeneity and the angular dependence of the quantum efficiency, including their relative uncertainties, have been investigated. In addition, first results of the performance in wide-angle X-ray scattering (WAXS), X-ray diffraction (XRD) and X-ray reflectometry (XRR) are presented.
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Submitted 4 February, 2020;
originally announced February 2020.
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Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Authors:
Mika Pflüger,
R. Joseph Kline,
Analía Fernández Herrero,
Martin Hammerschmidt,
Victor Soltwisch,
Michael Krumrey
Abstract:
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because measurements are fast with a proven capability to reconstruct average grating line profiles with high accuracy.
Aim: GISAXS measurements of grating line shapes…
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Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because measurements are fast with a proven capability to reconstruct average grating line profiles with high accuracy.
Aim: GISAXS measurements of grating line shapes should be extended to samples with pitches smaller than 50 nm and their defects. The method's performance should be evaluated.
Approach: A series of gratings with 32 nm pitch and deliberately introduced pitchwalk is measured using GISAXS. The grating line profiles with associated uncertainties are reconstructed using a Maxwell solver and Markov-Chain Monte Carlo (MCMC) sampling combined with a simulation library approach.
Results: The line shape and the pitchwalk are generally in agreement with previously published transmission small-angle X-ray scattering (SAXS) results; however the line height and line width show deviations of (1.0 +/- 0.2) nm and (2.0 +/- 0.7) nm, respectively. The complex data evaluation leads to relatively high pitchwalk uncertainties between 0.5 nm and 2 nm.
Conclusions: GISAXS shows great potential as a metrology tool for small-pitch line gratings with complex line profiles. Faster simulation methods would enable more accurate results.
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Submitted 29 January, 2020; v1 submitted 18 October, 2019;
originally announced October 2019.
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Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Authors:
Victor Soltwisch,
Analia Fernandez Herrero,
Mika Pflüger,
Anton Haase,
Jürgen Probst,
Christian Laubis,
Michael Krumrey,
Frank Scholze
Abstract:
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near and far field by numerically solving Maxwell's equations with a finite-element method are well established. The application of this technique to X-ray…
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Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near and far field by numerically solving Maxwell's equations with a finite-element method are well established. The application of this technique to X-rays is still challenging, due to the discrepancy between incident wavelength and finite-element size. This drawback vanishes for GISAXS due to the small angles of incidence, the conical scattering geometry and the periodicity of the surface structures, which allows a rigorous computation of the diffraction efficiencies with sufficient numerical precision. To develop dimensional metrology tools based on GISAXS, lamellar gratings with line widths down to 55 nm were produced by state-of-the-art e-beam lithography and then etched into silicon. The high surface sensitivity of GISAXS in conjunction with a Maxwell solver allows a detailed reconstruction of the grating line shape also for thick, non-homogeneous substrates. The reconstructed geometrical line shape models are statistically validated by applying a Markov chain Monte Carlo (MCMC) sampling technique which reveals that GISAXS is able to reconstruct critical parameters like the widths of the lines with sub-nm uncertainty.
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Submitted 4 October, 2017; v1 submitted 26 April, 2017;
originally announced April 2017.
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Grazing Incidence Small Angle X-Ray Scattering (GISAXS) on Small Targets Using Large Beams
Authors:
Mika Pflüger,
Victor Soltwisch,
Jürgen Probst,
Frank Scholze,
Michael Krumrey
Abstract:
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and t…
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GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from $50\,{\rmμm}$ down to $4\,{\rmμm}$ are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a $15\,{\rmμm}\,\times\,15\,{\rmμm}$ target grating structure is separated from the scattering signal of $100\,{\rmμm}\,\times\,100\,{\rmμm}$ nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. The described technique allows to apply GISAXS, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.
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Submitted 3 March, 2017;
originally announced March 2017.
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Improved measurement results for the Avogadro constant using a 28Si-enriched crystal
Authors:
Y Azuma,
P Barat,
G Bartl,
H Bettin,
M Borys,
I Busch,
L Cibik,
G D'Agostino,
K Fujii,
H Fujimoto,
A Hioki,
M Krumrey,
U Kuetgens,
N Kuramoto,
G Mana,
E Massa,
R Meeß,
S Mizushima,
T Narukawa,
A Nicolaus,
A Pramann,
S A Rabb,
O Rienitz,
C Sasso,
M Stock
, et al. (4 additional authors not shown)
Abstract:
New results are reported from an ongoing international research effort to accurately determine the Avogadro constant by counting the atoms in an isotopically enriched silicon crystal. The surfaces of two 28Si-enriched spheres were decontaminated and reworked in order to produce an outer surface without metal contamination and improved sphericity. New measurements were then made on these two recond…
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New results are reported from an ongoing international research effort to accurately determine the Avogadro constant by counting the atoms in an isotopically enriched silicon crystal. The surfaces of two 28Si-enriched spheres were decontaminated and reworked in order to produce an outer surface without metal contamination and improved sphericity. New measurements were then made on these two reconditioned spheres using improved methods and apparatuses. When combined with other recently refined parameter measurements, the Avogadro constant derived from these new results has a value of $N_A = 6.022 140 76(12) \times 10^{23}$ mol$^{-1}$. The X-ray crystal density method has thus achieved the target relative standard uncertainty of $2.0 \times 10^{-8}$ necessary for the realization of the definition of the new kilogram.
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Submitted 16 December, 2015;
originally announced December 2015.
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Characterization of an in-vacuum PILATUS 1M detector
Authors:
Jan Wernecke,
Christian Gollwitzer,
Peter Müller,
Michael Krumrey
Abstract:
A dedicated in-vacuum X-ray detector based on the hybrid pixel PILATUS 1M detector has been installed at the four-crystal monochromator beamline of PTB at the electron storage ring BESSY II in Berlin. Due to its windowless operation, the detector can be used in the entire photon energy range of the beamline from 10 keV down to 1.75 keV for small-angle X-ray scattering (SAXS) experiments and anomal…
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A dedicated in-vacuum X-ray detector based on the hybrid pixel PILATUS 1M detector has been installed at the four-crystal monochromator beamline of PTB at the electron storage ring BESSY II in Berlin. Due to its windowless operation, the detector can be used in the entire photon energy range of the beamline from 10 keV down to 1.75 keV for small-angle X-ray scattering (SAXS) experiments and anomalous SAXS (ASAXS) at absorption edges of light elements. The radiometric and geometric properties of the detector like quantum efficiency, pixel pitch and module alignment have been determined with low uncertainties. The first grazing incidence SAXS (GISAXS) results demonstrate the superior resolution in momentum transfer achievable at low photon energies.
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Submitted 12 February, 2014; v1 submitted 20 November, 2013;
originally announced November 2013.
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A diffraction effect in X-ray area detectors
Authors:
Christian Gollwitzer,
Michael Krumrey
Abstract:
When an X-ray area detector based on a single crystalline material, for instance, a state of the art hybrid pixel detector, is illuminated from a point source by monochromatic radiation, a pattern of lines appears which overlays the detected image. These lines can be easily found by scattering experiments with smooth patterns, such as small-angle X-ray scattering. The origin of this effect is the…
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When an X-ray area detector based on a single crystalline material, for instance, a state of the art hybrid pixel detector, is illuminated from a point source by monochromatic radiation, a pattern of lines appears which overlays the detected image. These lines can be easily found by scattering experiments with smooth patterns, such as small-angle X-ray scattering. The origin of this effect is the Bragg reflection in the sensor layer of the detector. Experimental images are presented over a photon energy range from 3.4 keV to 10 keV, together with a theoretical analysis. The intensity of this pattern is up to 20%, which can disturb the evaluation of scattering and diffraction experiments. The patterns can be exploited to check the alignment of the detector surface with the direct beam, and the alignment of individual detector modules with each other in the case of modular detectors, as well as for the energy calibration of the radiation.
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Submitted 18 November, 2013; v1 submitted 29 August, 2013;
originally announced August 2013.
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An accurate determination of the Avogadro constant by counting the atoms in a 28Si crystal
Authors:
B. Andreas,
Y. Azuma,
G. Bartl,
P. Becker,
H. Bettin,
M. Borys,
I. Busch,
M. Gray,
P. Fuchs,
K. Fujii,
H. Fujimoto,
E. Kessler,
M. Krumrey,
U. Kuetgens,
N. Kuramoto,
G. Mana,
P. Manson,
E. Massa,
S. Mizushima,
A. Nicolaus,
A. Picard,
A. Pramann,
O. Rienitz,
D. Schiel,
S. Valkiers
, et al. (1 additional authors not shown)
Abstract:
The Avogadro constant links the atomic and the macroscopic properties of matter. Since the molar Planck constant is well known via the measurement of the Rydberg constant, it is also closely related to the Planck constant. In addition, its accurate determination is of paramount importance for a definition of the kilogram in terms of a fundamental constant. We describe a new approach for its determ…
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The Avogadro constant links the atomic and the macroscopic properties of matter. Since the molar Planck constant is well known via the measurement of the Rydberg constant, it is also closely related to the Planck constant. In addition, its accurate determination is of paramount importance for a definition of the kilogram in terms of a fundamental constant. We describe a new approach for its determination by "counting" the atoms in 1 kg single-crystal spheres, which are highly enriched with the 28Si isotope. It enabled isotope dilution mass spectroscopy to determine the molar mass of the silicon crystal with unprecedented accuracy. The value obtained, 6.02214084(18) x 10^23 mol^-1, is the most accurate input datum for a new definition of the kilogram.
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Submitted 12 October, 2010;
originally announced October 2010.
