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Simultaneous Charge Carrier Density Mapping of SiC Epilayers and Substrates with Terahertz Time-Domain Spectroscopy
Authors:
Joshua Hennig,
Jens Klier,
Stefan Duran,
Kuei-Shen Hsu,
Jan Beyer,
Christian Roeder,
Franziska C. Beyer,
Nadine Schueler,
Nico Vieweg,
Katja Dutzi,
Georg von Freymann,
Daniel Molter
Abstract:
With the growing demand for efficient power electronics, SiC-based devices are progressively becoming more relevant. In contrast to established methods such as the mercury capacitance-voltage technique, terahertz spectroscopy promises a contactless characterization. In this work, we simultaneously determine the charge carrier density of SiC epilayers and their substrates in a single measurement ov…
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With the growing demand for efficient power electronics, SiC-based devices are progressively becoming more relevant. In contrast to established methods such as the mercury capacitance-voltage technique, terahertz spectroscopy promises a contactless characterization. In this work, we simultaneously determine the charge carrier density of SiC epilayers and their substrates in a single measurement over a wide range of about 8x10^(15)$ cm^(-3) to 4x10^(18) cm^(-3) using time-domain spectroscopy in a reflection geometry. Furthermore, inhomogeneities in the samples are detected by mapping the determined charge carrier densities over the whole wafer. Additional theoretical calculations confirm these results and provide thickness-dependent information on the doping range of 4H-SiC, in which terahertz time-domain spectroscopy is capable of determining the charge carrier density.
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Submitted 17 June, 2025;
originally announced June 2025.
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Terahertz Quantum Imaging
Authors:
Mirco Kutas,
Felix Riexinger,
Jens Klier,
Daniel Molter,
Georg von Freymann
Abstract:
Quantum imaging with undetected photons spatially transfers amplitude and phase information from one spectral region of physical interest to another spectral region that is easy to detect. The photon energy of the two spectral regions can, in principle, be separated by several orders of magnitude. However, quantum imaging with undetected photons has so far only been demonstrated in spectral region…
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Quantum imaging with undetected photons spatially transfers amplitude and phase information from one spectral region of physical interest to another spectral region that is easy to detect. The photon energy of the two spectral regions can, in principle, be separated by several orders of magnitude. However, quantum imaging with undetected photons has so far only been demonstrated in spectral regions of similar order of magnitude in frequency (and for which cameras are commercially available). Here, we demonstrate amplitude- and phase-sensitive imaging in the terahertz spectral region (1.5 THz center frequency) by detecting only visible photons (center wavelength 662.2 nm, 452.7 THz center frequency) more than two orders of magnitude apart. As a result, terahertz spectral information can be reliably detected with a standard CMOS camera without cooling, achieving a spatial resolution close to the wavelength. By taking advantage of quantum distillation in a nonlinear interferometer, the influence of ubiquitous thermal terahertz photons can be neglected. Our results are in good agreement with numerical simulations of the imaging process and demonstrate the huge potential of this method to address otherwise challenging spectral regions where cameras do not exist.
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Submitted 5 August, 2024;
originally announced August 2024.
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Wide-range resistivity characterization of semiconductors with terahertz time-domain spectroscopy
Authors:
Joshua Hennig,
Jens Klier,
Stefan Duran,
Kuei-Shen Hsu,
Jan Beyer,
Christian Röder,
Franziska C. Beyer,
Nadine Schüler,
Nico Vieweg,
Katja Dutzi,
Georg von Freymann,
Daniel Molter
Abstract:
Resistivity is one of the most important characteristics in the semiconductor industry. The most common way to measure resistivity is the four-point probe method, which requires physical contact with the material under test. Terahertz time domain spectroscopy, a fast and non-destructive measurement method, is already well established in the characterization of dielectrics. In this work, we demonst…
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Resistivity is one of the most important characteristics in the semiconductor industry. The most common way to measure resistivity is the four-point probe method, which requires physical contact with the material under test. Terahertz time domain spectroscopy, a fast and non-destructive measurement method, is already well established in the characterization of dielectrics. In this work, we demonstrate the potential of two Drude model-based approaches to extract resistivity values from terahertz time-domain spectroscopy measurements of silicon in a wide range from about 10$^{-3}$ $Ω$cm to 10$^{2}$ $Ω$cm. One method is an analytical approach and the other is an optimization approach. Four-point probe measurements are used as a reference. In addition, the spatial resistivity distribution is imaged by X-Y scanning of the samples to detect inhomogeneities in the doping distribution.
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Submitted 23 January, 2024;
originally announced January 2024.
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Sample thickness measurements by phase-sensitive terahertz upconversion detection
Authors:
Tobias Pfeiffer,
Jens Klier,
Georg von Freymann,
Daniel Molter
Abstract:
Nonlinear frequency conversion provides an elegant method to detect photons in a spectral range which differs from the pump wavelength, making it highly attractive for photons with inherently low energy. Aside from the intensity of the light, represented by the number of photons, their phase provides important information and enables a plethora of applications. We present a phase-sensitive measure…
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Nonlinear frequency conversion provides an elegant method to detect photons in a spectral range which differs from the pump wavelength, making it highly attractive for photons with inherently low energy. Aside from the intensity of the light, represented by the number of photons, their phase provides important information and enables a plethora of applications. We present a phase-sensitive measurement method in the terahertz spectral range by only detecting visible light. Using the optical interference of frequency-converted photons and leftover pump photons of the involved ultrashort pulses, fast determination of layer-thicknesses is demonstrated. The new method enables phase-resolved detection of terahertz pulses using standard sCMOS equipment while achieving sample measurement times of less than one second with a precision error of less than 0.6%.
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Submitted 9 February, 2022;
originally announced February 2022.
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Quantum-inspired terahertz spectroscopy with visible photons
Authors:
Mirco Kutas,
Björn Haase,
Jens Klier,
Daniel Molter,
Georg von Freymann
Abstract:
Terahertz spectroscopy allows for identifying different isomers of materials, for drug discrimination as well as for detecting hazardous substances. As many dielectric materials used for packaging are transparent in the terahertz spectral range, substances might even be identified if packaged. Despite these useful applications, terahertz spectroscopy suffers from the still technically demanding de…
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Terahertz spectroscopy allows for identifying different isomers of materials, for drug discrimination as well as for detecting hazardous substances. As many dielectric materials used for packaging are transparent in the terahertz spectral range, substances might even be identified if packaged. Despite these useful applications, terahertz spectroscopy suffers from the still technically demanding detection of terahertz radiation. Thus, either coherent time-domain-spectroscopy schemes employing ultrafast pulsed lasers or continuous-wave detection with photomixers requiring two laser systems are used to circumvent the challenge to detect such low-energetic radiation without using cooled detectors. Here, we report on the first demonstration of terahertz spectroscopy, in which the sample interacts with terahertz idler photons, while only correlated visible signal photons are detected - a concept inspired by quantum optics. To generate these correlated signal-idler photon pairs, a periodically poled lithium niobate crystal and a 660 nm continuous-wave pump source are used. After propagating through a single-crystal nonlinear interferometer, the pump photons are separated from the signal radiation by highly efficient and narrowband volume Bragg gratings. An uncooled scientific CMOS camera detects the frequency-angular spectra of the remaining visible signal and reveals terahertz-spectral information in the Stokes as well as the anti-Stokes part of collinear forward generation. Neither cooled detectors nor expensive pulsed lasers for coherent detection are required. We demonstrate spectroscopy on the well-known absorption features in the terahertz spectral range of $α$-lactose monohydrate and para-aminobenzoic acid by detecting only visible photons.
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Submitted 5 November, 2020;
originally announced November 2020.
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Design of a Helium Passivation System for the Target Vessel of the Beam Dump Facility at CERN
Authors:
P. Avigni,
M. Battistin,
M. Calviani,
P. Dalakov,
K. Kershaw,
J. Klier,
M. Lamont,
E. Lopez Sola,
J. M. Martin Ruiz
Abstract:
The Beam Dump Facility (BDF) is a proposed general-purpose facility at CERN, dedicated to fixed target and beam dump experiments, currently being developed in the context of the Physics Beyond Colliders program. The design of the facility will allow to host different types of experiments, of which SHiP is planned to be the initial one. The core of the facility is a high-density target/dump absorbi…
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The Beam Dump Facility (BDF) is a proposed general-purpose facility at CERN, dedicated to fixed target and beam dump experiments, currently being developed in the context of the Physics Beyond Colliders program. The design of the facility will allow to host different types of experiments, of which SHiP is planned to be the initial one. The core of the facility is a high-density target/dump absorbing the full intensity of the SPS beam and generating a cascade of particles that are detected downstream the target complex. The target and its shielding blocks are positioned inside a vessel, which is planned to be passivized with helium, in order to reduce the activation of the gas surrounding the target and to extend the operational life of materials and equipment. The passivation system that will be in charge of purifying and circulating the helium is a critical component for the operation of the facility. Fluid dynamics simulations have been performed to study the circulation of the helium through the vessel. A detailed design of the helium passivation system and its main components has been developed.
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Submitted 18 November, 2019; v1 submitted 1 October, 2019;
originally announced October 2019.
