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Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms
Authors:
Abderzak El Farsy,
Dimitri Boivin,
Cédric Noel,
Robert Hugon,
Stephane Cuynet,
Jamal Bougdira,
Ludovic de Poucques
Abstract:
We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spectrometry measurements of ionized sputtered atoms correlated to time-resolved tuneable diode-laser induced fluorescence (TR-TDLIF) measurements of neutral sputtered atoms were used to understand transport features. Based o…
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We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spectrometry measurements of ionized sputtered atoms correlated to time-resolved tuneable diode-laser induced fluorescence (TR-TDLIF) measurements of neutral sputtered atoms were used to understand transport features. Based on ion energy distributions of Ti$^+$, we identified four populations of ions and explore their physical origins. The signals of all ion populations decrease strongly when only 1% N$_2$ is added to the Ar/N$_2$ gas mixture. Time resolved mass spectrometry confirms the result reported in previous work: the fast target poisoning when nitrogen is added in HiPIMS discharges. Based on the measured energy distribution functions of Ti$^{++}$, N$^+$, N$_2^+$, and Ar$^+$, we discuss the production of these ions in HiPIMS discharges. The temperature of thermalized sputtered neutral atoms determined by previous TR-TDLIF measurements evidences the physical origin of an ion population with energies lower than 4 eV. According to discharge pressure, cathode voltage, and ion type, we also discuss the physical origins of high-energy ions (>4 eV).
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Submitted 31 May, 2021;
originally announced May 2021.
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Automatic detection and tracking of dust particles in a RF plasma sheath
Authors:
Y. Zayachuk,
F. Brochard,
S. Bardin,
J-L. Briançon,
R. Hugon,
J. Bougdira
Abstract:
A method enabling automatic detection and tracking of large amounts of individual dust particles in plasmas is presented. Individual trajectories can be found with a good spatiotemporal resolution, even without applying any external light source to facilitate detection. Main advantages of this method is a high portability and the possibility of making statistical analyses of the trajectories of a…
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A method enabling automatic detection and tracking of large amounts of individual dust particles in plasmas is presented. Individual trajectories can be found with a good spatiotemporal resolution, even without applying any external light source to facilitate detection. Main advantages of this method is a high portability and the possibility of making statistical analyses of the trajectories of a large amount of non uniformly size distributed particles, under challenging illumination conditions and with low time and computational resources. In order to evaluate the efficiency of different detection and tracking strategies statistically, an experimental benchmark is proposed, and completed by numerical simulations.
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Submitted 17 October, 2010;
originally announced October 2010.
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Investigating transport of dust particles in plasmas
Authors:
S. Bardin,
J-L. Briançon,
F. Brochard,
V. Martin,
Y. Zayachuk,
R. Hugon,
J. Bougdira
Abstract:
An algorithm has been developped, which makes it possible to automatically extract trajectories of a large number of particles from fast imaging data, allowing a statistical analysis of particles trajectories under various plasma conditions, a better understanding of their influence on plasma properties, and a better characterization of the plasma itself. In this contribution, we focus on results…
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An algorithm has been developped, which makes it possible to automatically extract trajectories of a large number of particles from fast imaging data, allowing a statistical analysis of particles trajectories under various plasma conditions, a better understanding of their influence on plasma properties, and a better characterization of the plasma itself. In this contribution, we focus on results obtained in a radiofrequency parallel plate reactor, where a large amount of micron-sized carbon dust is produced in situ. The use of the rescaled range analysis (R/S analysis) applied to dust particles displacements allows decomposing dust dynamic on different time scales. It is shown that dust displacement is dominated by collisions on short time scales whereas long term behaviour is strongly influenced by large scale plasma fluctuations.
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Submitted 24 August, 2010;
originally announced August 2010.
