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A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics
Authors:
Nahid Hosseini,
Matthias Neuenschwander,
Jonathan D. Adams,
Santiago H. Andany,
Oliver Peric,
Marcel Winhold,
Maria Carmen Giordano,
Vinayak Shantaram Bhat,
Dirk Grundler,
Georg E. Fantner
Abstract:
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive measurements of force, acceleration, or the presence of biological analytes. In particular, strain sensors integrated onto MEMS cantilevers are widely used to transduce…
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Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive measurements of force, acceleration, or the presence of biological analytes. In particular, strain sensors integrated onto MEMS cantilevers are widely used to transduce an applied force to an electrically measurable signal in applications like atomic force microscopy, mass sensing, or molecular detection. However, the high Young's moduli of traditional cantilever materials (silicon or silicon nitride) limit the thickness of the devices, and therefore the deflection sensitivity that can be obtained for a specific spring constant. Using softer materials such as polymers as the structural material of the MEMS device would overcome this problem. However, these materials are incompatible with high-temperature fabrication processes often required to fabricate high quality electronic strain sensors. We introduce a pioneering solution that seamlessly integrates the benefits of polymer MEMS technology with the remarkable sensitivity of strain sensors, even under high-temperature deposition conditions. Cantilevers made using this technology are inherently fluid compatible and have shown up to 6 times lower force noise than their conventional counterparts. We demonstrate the benefits and versatility of this polymer/ceramic/semiconductor multi-layer fabrication approach with the examples of self-sensing AFM cantilevers, and membrane surface stress sensors for biomolecule detection.
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Submitted 11 July, 2023;
originally announced July 2023.
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Growth and characterization of thorium-doped calcium fluoride single crystals
Authors:
Kjeld Beeks,
Tomas Sikorsky,
Veronika Rosecker,
Martin Pressler,
Fabian Schaden,
David Werban,
Niyusha Hosseini,
Lukas Rudischer,
Felix Schneider,
Patrick Berwian,
Jochen Friedrich,
Dieter Hainz,
Jan Welch,
Johannes H. Sterba,
Georgy Kazakov,
Thorsten Schumm
Abstract:
We have grown $^{232}$Th:CaF$_2$ and $^{229}$Th:CaF$_2$ single crystals for investigations on the VUV laser-accessible first nuclear excited state of $^{229}$Th. To reach high doping concentrations despite the extreme scarcity (and radioactivity) of $^{229}$Th, we have scaled down the crystal volume by a factor 100 compared to established commercial or scientific growth processes. We use the verti…
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We have grown $^{232}$Th:CaF$_2$ and $^{229}$Th:CaF$_2$ single crystals for investigations on the VUV laser-accessible first nuclear excited state of $^{229}$Th. To reach high doping concentrations despite the extreme scarcity (and radioactivity) of $^{229}$Th, we have scaled down the crystal volume by a factor 100 compared to established commercial or scientific growth processes. We use the vertical gradient freeze method on 3.2 mm diameter seed single crystals with a 2 mm drilled pocket, filled with a co-precipitated CaF$_2$:ThF$_4$:PbF$_2$ powder in order to grow single crystals. Concentrations of $4\cdot10^{19}$ cm$^{-3}$ have been realized with $^{232}$Th with good ($>$10%) VUV transmission. However, the intrinsic radioactivity of $^{229}$Th drives radio-induced dissociation during growth and radiation damage after solidification. Both lead to a degradation of VUV transmission, limiting the $^{229}$Th concentration to $<5\cdot10^{17}$ cm$^{-3}$.
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Submitted 10 November, 2022;
originally announced November 2022.
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Flow states and transitions in flow past arrays of tandem cylinders
Authors:
Negar Hosseini,
Martin D. Griffith,
Justin S. Leontini
Abstract:
Direct numerical simulations at Re = 200 have been conducted of the flow past rows of tandem cylinders. Local stability analysis shows that the wakes of two tandem cylinders are characterised by the formation of a region where the mean flow is locally absolutely unstable immediately behind the second cylinder, followed by a long region that is convectively unstable. The location where the flow cha…
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Direct numerical simulations at Re = 200 have been conducted of the flow past rows of tandem cylinders. Local stability analysis shows that the wakes of two tandem cylinders are characterised by the formation of a region where the mean flow is locally absolutely unstable immediately behind the second cylinder, followed by a long region that is convectively unstable. The location where the flow changes from absolutely to convectively unstable provides a prediction of where the placement of a third body could trigger a global change, which is confirmed with simulations of the flow past three cylinders, and the flow past two cylinders followed by a short flat plate. A third body placed downstream of the absolute/convective instability transition location is effectively cloaked, its presence having virtually no impact on the flow both upstream and downstream. However, when a body is placed upstream of this location it triggers a global change in the flow, its presence being broadcast throughout the flow domain. However, a third cylinder placed well upstream of this location does not trigger the global change. Sensitivity analysis of the mean flow is conducted, and it is shown that the third cylinder does not simply act as a small perturbation that can excite sensitive regions, but when it is very close to the second cylinder it induces a mean flow correction that eliminates the sensitive regions which may explain why it does not trigger the global change.
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Submitted 25 July, 2020;
originally announced July 2020.
