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Fabrication Optimization of van der Waals Metasurfaces: Inverse Patterning Boosts Resonance Quality Factor
Authors:
Jonas Biechteler,
Connor Heimig,
Thomas Weber,
Dmytro Gryb,
Luca Sortino,
Stefan A. Maier,
Leonardo de S. Menezes,
Andreas Tittl
Abstract:
Van der Waals (vdW) materials have garnered growing interest for use as nanophotonic building blocks that offer precise control over light-matter interaction at the nanoscale, such as optical metasurfaces hosting sharp quasi-bound states in the continuum resonances. However, traditional fabrication strategies often rely on lift-off processes, which inherently introduce imperfections in resonator s…
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Van der Waals (vdW) materials have garnered growing interest for use as nanophotonic building blocks that offer precise control over light-matter interaction at the nanoscale, such as optical metasurfaces hosting sharp quasi-bound states in the continuum resonances. However, traditional fabrication strategies often rely on lift-off processes, which inherently introduce imperfections in resonator shape and size distribution, ultimately limiting the resonance performance. Here, an optimized fabrication approach for vdW-metasurfaces is presented that implements inverse patterning of the etching mask, resulting in increased resonator quality solely limited by the resolution of the electron beam lithography resist and etching. Applying this inverse fabrication technique on hexagonal boron nitride (hBN), quality (Q) factors exceeding $10^3$ in the visible spectral range were demonstrated, significantly surpassing previous results shown by lift-off fabricated structures. Additionally, the platforms potential as a biosensor was displayed, achieving competitive sensitivity and figure of merit of 220 in a refractive index sensing experiment. The inverse technique was applied to create chiral metasurfaces from hBN, using a two-height resonator geometry to achieve up to 50 % transmittance selectivity. This inverse lithography technique paves the way towards high-performances vdW-devices with high-Q resonances, establishing hBN as a cornerstone for next-generation nanophotonic and optoelectronic devices.
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Submitted 21 March, 2025;
originally announced March 2025.
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Spatially Encoded Polaritonic Ultra-Strong Coupling in Gradient Metasurfaces with Epsilon-Near-Zero Modes
Authors:
Enrico Bau,
Andreas Aigner,
Jonas Biechteler,
Connor Heimig,
Thorsten Goelz,
Stefan A. Maier,
Andreas Tittl
Abstract:
We introduce a platform to achieve ultra-strong coupling (USC) between light and matter using widely available materials. USC is a light-matter interaction regime characterized by coupling strengths exceeding 10% of the ground state energy. It gives rise to novel physical phenomena, such as efficient single-photon coupling and quantum gates, with applications in quantum sensing, nonlinear optics,…
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We introduce a platform to achieve ultra-strong coupling (USC) between light and matter using widely available materials. USC is a light-matter interaction regime characterized by coupling strengths exceeding 10% of the ground state energy. It gives rise to novel physical phenomena, such as efficient single-photon coupling and quantum gates, with applications in quantum sensing, nonlinear optics, and low-threshold lasing. Although early demonstrations in plasmonic systems have been realized, achieving USC in dielectric platforms, which offer lower losses and high Q-factors, remains challenging due to typically low mode overlap between the photonic field and the material resonance. Here we leverage dielectric dual gradient metasurfaces supporting quasi-bound states in the continuum to spatially encode both the spectral and coupling parameter space and demonstrate USC to an epsilon-near-zero (ENZ) mode in an ultra-thin SiO2 layer. The strong out-of-plane electric fields in our tapered bar structure overlap exceptionally well with those of the ENZ mode, resulting in a normalized coupling strength of 0.101 and a mode splitting equivalent to 20% of the ENZ mode energy; a four- to five-fold increase compared to previous approaches. The strong field confinement of our approach opens new possibilities for compact and scalable polaritonic devices, such as tunable frequency converters and low-energy optical modulators.
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Submitted 5 June, 2025; v1 submitted 19 February, 2025;
originally announced February 2025.
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Chiral Nonlinear Polaritonics with van der Waals Metasurfaces
Authors:
Connor Heimig,
Alexander A. Antonov,
Dmytro Gryb,
Thomas Possmayer,
Thomas Weber,
Michael Hirler,
Jonas Biechteler,
Luca Sortino,
Leonardo de S. Menezes,
Stefan A. Maier,
Maxim V. Gorkunov,
Yuri Kivshar,
Andreas Tittl
Abstract:
In the strong-coupling regime, the interaction between light and matter reaches a hybridization state where the photonic and material components are inseparably linked. Using tailored states of light to break symmetries in such systems can facilitate the development of novel non-equilibrium quantum materials. Chiral optical cavities offer a promising approach for this, enabling either temporal or…
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In the strong-coupling regime, the interaction between light and matter reaches a hybridization state where the photonic and material components are inseparably linked. Using tailored states of light to break symmetries in such systems can facilitate the development of novel non-equilibrium quantum materials. Chiral optical cavities offer a promising approach for this, enabling either temporal or spatial symmetry-breaking, both of which are unachievable with conventional mirror cavities. For spatial symmetry-breaking, a cavity must discriminate the handedness of circularly polarized light, a functionality uniquely provided by chiral metamaterials. Here, we propose and demonstrate experimentally a chiral transition metal dichalcogenide (TMDC) metasurface with broken out-of-plane symmetry, allowing for the selective formation of self-hybridized exciton-polaritons with specific handedness. Our metasurface maintains maximal chirality for oblique incidence up to 20°, significantly outperforming all previously known designs, thereby transforming the angle of incidence from a constraint into a new degree of freedom for sub-nanometer-precise tuning of the cavity's resonant wavelength. Moreover, we study the chiral strong-coupling regime in nonlinear experiments and reveal the polariton-driven nature of chiral third-harmonic generation. Our results demonstrate a clear pathway towards van der Waals (vdW) metasurfaces as a novel and potent platform for chiral polaritonics with implications in a wide range of photonics research, such as non-reciprocal photonic devices and valleytronics.
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Submitted 24 June, 2025; v1 submitted 24 October, 2024;
originally announced October 2024.
