Showing 1–4 of 4 results for author: Harder, I

Simplified Aluminum Nitride Processing for Low-Loss Integrated Photonics and Nonlinear Optics

Authors: Haochen Yan, Shuangyou Zhang, Arghadeep Pal, Alekhya Gosh, Abdullah Alabbadi, Masoud Kheyri, Toby Bi, Yaojing Zhang, Irina Harder, Olga Lohse, Florentina Gannott, Alexander Gumann, Eduard Butzen, Katrin Ludwig, Pascal DelHaye

Abstract: Aluminum nitride (AlN) is an extremely promising material for integrated photonics because of the combination of strong \c{hi}2 and \c{hi}3 nonlinearities. However, the intrinsic hardness of the material and charging effects during electron beam lithography make AlN nanofabrication a challenging process. Conventional approaches often require multiple hard masks and a metal mask to fabricate nanost… ▽ More Aluminum nitride (AlN) is an extremely promising material for integrated photonics because of the combination of strong \c{hi}2 and \c{hi}3 nonlinearities. However, the intrinsic hardness of the material and charging effects during electron beam lithography make AlN nanofabrication a challenging process. Conventional approaches often require multiple hard masks and a metal mask to fabricate nanostructures. In this letter, we report a novel, simple method to fabricate AlN microresonators by using a single layer of silicon nitride mask combined with a thin conductive polymer layer. The conductive layer can be conveniently removed during developing without requiring an additional etching step. We achieve high intrinsic quality (Q) factors up to one million in AlN microresonators and demonstrate several nonlinear phenomena within our devices, including frequency comb generation, Raman lasing, third harmonic generation and supercontinuum generation. △ Less

Submitted 27 June, 2025; originally announced June 2025.

Inverse-Designed Silicon Nitride Nanophotonics

Authors: Toby Bi, Shuangyou Zhang, Egemen Bostan, Danxian Liu, Aditya Paul, Olga Ohletz, Irina Harder, Yaojing Zhang, Alekhya Ghosh, Abdullah Alabbadi, Masoud Kheyri, Tianyi Zeng, Jesse Lu, Kiyoul Yang, Pascal Del'Haye

Abstract: Silicon nitride photonics has enabled integration of a variety of components for applications in linear and nonlinear optics, including telecommunications, optical clocks, astrocombs, bio-sensing, and LiDAR. With the advent of inverse design - where desired device performance is specified and closely achieved through iterative, gradient-based optimization - and the increasing availability of silic… ▽ More Silicon nitride photonics has enabled integration of a variety of components for applications in linear and nonlinear optics, including telecommunications, optical clocks, astrocombs, bio-sensing, and LiDAR. With the advent of inverse design - where desired device performance is specified and closely achieved through iterative, gradient-based optimization - and the increasing availability of silicon nitride photonics via foundries, it is now feasible to expand the photonic design library beyond the limits of traditional approaches and unlock new functionalities. In this work, we present inverse-designed photonics on a silicon nitride platform and demonstrate both the design capabilities and experimental validation of manipulating light in wavelength and spatial mode dimensions to high-Q resonators with controllable wavelength range and dispersion. Furthermore, we use these inverse-designed structures to form optical cavities that hold promise for on-chip nonlinear and quantum optics experiments. △ Less

Submitted 19 May, 2025; originally announced May 2025.

Room-Temperature Sputtered Ultralow-loss Silicon Nitride for Hybrid Photonic Integration

Authors: Shuangyou Zhang, Toby Bi, Irina Harder, Olga Lohse, Florentina Gannott, Alexander Gumann, Yaojing Zhang, Pascal Del'Haye

Abstract: Silicon-nitride-on-insulator photonic circuits have seen tremendous advances in many applications, such as on-chip frequency combs, Lidar, telecommunications, and spectroscopy. So far, the best film quality has been achieved with low pressure chemical vapor deposition (LPCVD) and high-temperature annealing (1200 °C). However, high processing temperature poses challenges to the cointegration of Si3… ▽ More Silicon-nitride-on-insulator photonic circuits have seen tremendous advances in many applications, such as on-chip frequency combs, Lidar, telecommunications, and spectroscopy. So far, the best film quality has been achieved with low pressure chemical vapor deposition (LPCVD) and high-temperature annealing (1200 °C). However, high processing temperature poses challenges to the cointegration of Si3N4 with pre-processed silicon electronic and photonic devices, lithium niobate on insulator (LNOI), and Ge-on-Si photodiodes. This limits LPCVD as a front-end-of-line process. Here, we demonstrate ultralow-loss Silicon nitride photonics based on room-temperature reactive sputtering. Propagation losses as low as 5.4 dB/m after 400 °C annealing and 3.5 dB/m after 800 °C annealing are achieved, enabling ring resonators with more than 10 million optical quality factors. To the best of our knowledge, these are the lowest propagation losses achieved with low temperature silicon nitride. This ultralow loss enables threshold powers for optical parametric oscillations to 1.1 mW and enables the generation of bright soliton frequency combs at 1.3 and 1.5 μm. Our work features a full complementary metal oxide semiconductor (CMOS) compatibility with front-end silicon electronics and photonics, and has the potential for hybrid 3D monolithic integration with III-V-on-Si integrated lasers, and LNOI. △ Less

Submitted 25 January, 2023; originally announced January 2023.

On-chip linear and nonlinear control of single molecules coupled to a nanoguide

Authors: Pierre Türschmann, Nir Rotenberg, Jan Renger, Irina Harder, Olga Lohse, Tobias Utikal, Stephan Götzinger, Vahid Sandoghdar

Abstract: While experiments with one or two quantum emitters have become routine in various laboratories, scalable platforms for efficient optical coupling of many quantum systems remain elusive. To address this issue, we report on chip-based systems made of one-dimensional subwavelength dielectric waveguides (nanoguides) and polycyclic aromatic hydrocarbon molecules. After discussing the design and fabrica… ▽ More While experiments with one or two quantum emitters have become routine in various laboratories, scalable platforms for efficient optical coupling of many quantum systems remain elusive. To address this issue, we report on chip-based systems made of one-dimensional subwavelength dielectric waveguides (nanoguides) and polycyclic aromatic hydrocarbon molecules. After discussing the design and fabrication requirements, we present data on coherent linear and nonlinear spectroscopy of single molecules coupled to a nanoguide mode. Our results show that external microelectrodes as well as optical beams can be used to switch the propagation of light in a nanoguide via the Stark effect and a nonlinear optical process, respectively. The presented nanoguide architecture paves the way for the investigation of many-body phenomena and polaritonic states and can be readily extended to more complex geometries for the realization of quantum integrated photonic circuits. △ Less

Submitted 20 February, 2017; originally announced February 2017.

Comments: 5 pages, 4 figures