Optical characterization of gaps in directly bonded Si compound optics using infrared spectroscopy
Authors:
Michael Gully-Santiago,
Daniel T. Jaffe,
Victor White
Abstract:
Silicon direct bonding offers flexibility in the design and development of Si optics by allowing manufacturers to combine subcomponents with a potentially lossless and mechanically stable interface. The bonding process presents challenges in meeting the requirements for optical performance because air gaps at the Si interface cause large Fresnel reflections. Even small (35 nm) gaps reduce transmis…
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Silicon direct bonding offers flexibility in the design and development of Si optics by allowing manufacturers to combine subcomponents with a potentially lossless and mechanically stable interface. The bonding process presents challenges in meeting the requirements for optical performance because air gaps at the Si interface cause large Fresnel reflections. Even small (35 nm) gaps reduce transmission through a direct bonded Si compound optic by 4% at $λ= 1.25 \; μ$m at normal incidence. We describe a bond inspection method that makes use of precision slit spectroscopy to detect and measure gaps as small as 14 nm. Our method compares low finesse Fabry-Pérot models to high precision measurements of transmission as a function of wavelength. We demonstrate the validity of the approach by measuring bond gaps of known depths produced by microlithography.
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Submitted 3 November, 2015;
originally announced November 2015.
The first SPIE software Hack Day
Authors:
Sarah Kendrew,
Casey Deen,
Nicole Radziwill,
Steve Crawford,
James Gilbert,
Michael Gully-Santiago,
Petr Kubanek
Abstract:
We report here on the software Hack Day organised at the 2014 SPIE conference on Astronomical Telescopes and Instrumentation in Montreal. The first ever Hack Day to take place at an SPIE event, the aim of the day was to bring together developers to collaborate on innovative solutions to problems of their choice. Such events have proliferated in the technology community, providing opportunities to…
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We report here on the software Hack Day organised at the 2014 SPIE conference on Astronomical Telescopes and Instrumentation in Montreal. The first ever Hack Day to take place at an SPIE event, the aim of the day was to bring together developers to collaborate on innovative solutions to problems of their choice. Such events have proliferated in the technology community, providing opportunities to showcase, share and learn skills. In academic environments, these events are often also instrumental in building community beyond the limits of national borders, institutions and projects. We show examples of projects the participants worked on, and provide some lessons learned for future events.
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Submitted 6 August, 2014;
originally announced August 2014.
