Showing 1–2 of 2 results for author: Favreliere, H
-
Development of low frequencies, insulating thick diaphragms for power MEMS applications
Authors:
Fabien Formosa,
Adrien Badel,
Hugues Favrelière
Abstract:
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures. However, the thermal isolation would call for very thick structures which are associated to too high resonant frequencies which are detrimental to the engine perform…
▽ More
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures. However, the thermal isolation would call for very thick structures which are associated to too high resonant frequencies which are detrimental to the engine performances. A thermal and mechanical compromise is to be made. On the contrary, based on fluid structure interaction, using an incompressible fluid contained in a cavity sealed by deformable diaphragm it would be possible to design a thick, low frequency insulating diaphragm. The design involves a simple planar geometry that is easy to manufacture with standard microelectronics methods. An analytical fluid structure model is proposed and theoretically validated. Experimental structures are realized and tested. The model is in agreement with the experimental results. A dimensionless model is proposed to design hybrid fluid structures for micromachines.
△ Less
Submitted 19 January, 2013;
originally announced January 2013.
-
Identification of machining defects by Small Displacement Torsor and form parameterization method
Authors:
Alain Sergent,
Minh-Hien Bui,
Hugues Favreliere,
Daniel Duret,
Serge Samper,
François Villeneuve
Abstract:
In the context of product quality, the methods that can be used to estimate machining defects and predict causes of these defects are one of the important factors of a manufacturing process. The two approaches that are presented in this article are used to determine the machining defects. The first approach uses the Small Displacement Torsor (SDT) concept [BM] to determine displacement dispersions…
▽ More
In the context of product quality, the methods that can be used to estimate machining defects and predict causes of these defects are one of the important factors of a manufacturing process. The two approaches that are presented in this article are used to determine the machining defects. The first approach uses the Small Displacement Torsor (SDT) concept [BM] to determine displacement dispersions (translations and rotations) of machined surfaces. The second one, which takes into account form errors of machined surface (i.e. twist, comber, undulation), uses a geometrical model based on the modal shape's properties, namely the form parameterization method [FS1]. A case study is then carried out to analyze the machining defects of a batch of machined parts.
△ Less
Submitted 15 February, 2011;
originally announced February 2011.
