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Highly Uniform Thermally Undercut Silicon Photonic Devices in a 300 mm CMOS Foundry Process
Authors:
Robert Parsons,
Kaylx Jang,
Yuyang Wang,
Asher Novick,
A. Matthew Smith,
Christopher C. Tison,
Yonas Gebregiorgis,
Venkatesh Deenadayalan,
Matthew van Niekerk,
Lewis Carpenter,
Tat Ngai,
Gerald Leake,
Daniel Coleman,
Xiang Meng,
Stefan Preble,
Michael L. Fanto,
Keren Bergman,
Anthony Rizzo
Abstract:
Silicon photonic devices fundamental to high-density wavelength-division multiplexed (DWDM) optical links and photonic switching networks, such as resonant modulators and Mach-Zehnder interferometers (MZIs), are highly sensitive to fabrication variations and operational temperature swings. However, thermal tuning to compensate for fabrication and operational temperature variations can result in pr…
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Silicon photonic devices fundamental to high-density wavelength-division multiplexed (DWDM) optical links and photonic switching networks, such as resonant modulators and Mach-Zehnder interferometers (MZIs), are highly sensitive to fabrication variations and operational temperature swings. However, thermal tuning to compensate for fabrication and operational temperature variations can result in prohibitive power consumption, challenging the scalability of energy-efficient photonic integrated circuits (PICs). In this work, we develop and demonstrate a wafer-scale thermal undercut process in a 300 mm complementary metal oxide semiconductor (CMOS) foundry that dramatically improves the thermal isolation of thermo-optic devices by selectively removing substrate material beneath the waveguides and resonators. This approach significantly reduces the power required for thermal tuning across multiple device architectures, achieving almost a 5$\times$ improvement in tuning efficiency in a state-of-the-art 4.5 $μ$m radius microdisk modulator and a 40$\times$ improvement in efficiency for a MZI phase shifter. To the best of the authors' knowledge, we demonstrate the first wafer-scale comparison of non-undercut and undercut silicon photonic devices using comprehensive wafer-scale measurements across 64 reticles of a 300 mm silicon-on-insulator (SOI) wafer. Further, we demonstrate a comprehensive wafer-scale analysis of the influence of undercut trench opening geometry on device tuning efficiency. Notably, we observe highly uniform performance across the full 300 mm wafer for multiple device types, emphasizing that our process can be scaled to large-scale photonic circuits with high yield. These results open new opportunities for large-scale integrated photonic circuits using thermo-optic devices, paving the way for scalable, low-power silicon photonic systems.
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Submitted 6 June, 2025; v1 submitted 11 March, 2025;
originally announced March 2025.
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Frequency auto-homogenization using group-velocity-matched downconversion
Authors:
Dylan Heberle,
Christopher C. Tison,
James Schneeloch,
A. Matthew Smith,
Paul M. Alsing,
Jeffrey Moses,
Michael L. Fanto
Abstract:
With the stability of integrated photonics at network nodes and the advantages of photons as flying qubits, photonic quantum information processing (PQIP) makes quantum networks increasingly scalable. However, scaling up PQIP requires the preparation of many identical single photons which is limited by the spectral distinguishability of integrated single-photon sources due to variations in fabrica…
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With the stability of integrated photonics at network nodes and the advantages of photons as flying qubits, photonic quantum information processing (PQIP) makes quantum networks increasingly scalable. However, scaling up PQIP requires the preparation of many identical single photons which is limited by the spectral distinguishability of integrated single-photon sources due to variations in fabrication or local environment. To address this, we introduce frequency auto-homogenization via group-velocity-matched downconversion to remove spectral distinguishability in varying quantum emitters. We present our theory using $χ^{(2)}$ quantum frequency conversion and show proof-of-principle data in a free-space optical setup.
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Submitted 4 February, 2025;
originally announced February 2025.
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Bypassing the filtering challenges in microwave-optical quantum transduction through optomechanical four-wave mixing
Authors:
James Schneeloch,
Erin Sheridan,
A. Matthew Smith,
Christopher C. Tison,
Daniel L. Campbell,
Matthew D. LaHaye,
Michael L. Fanto,
Paul M. Alsing
Abstract:
Microwave-optical quantum transduction is a key enabling technology in quantum networking, but has been plagued by a formidable technical challenge. As most microwave-optical-transduction techniques rely on three-wave mixing processes, the processes consume photons from a driving telecom-band (pump) laser to convert input microwave photons into telecom-band photons detuned from the laser by this m…
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Microwave-optical quantum transduction is a key enabling technology in quantum networking, but has been plagued by a formidable technical challenge. As most microwave-optical-transduction techniques rely on three-wave mixing processes, the processes consume photons from a driving telecom-band (pump) laser to convert input microwave photons into telecom-band photons detuned from the laser by this microwave frequency. However, cleanly separating out single photons detuned only a few GHz away from a classically bright laser in the same spatial mode requires frequency filters of unprecedented extinction over a very narrow transition band, straining the capabilities of today's technology. Instead of confronting this challenge directly, we show how one may achieve the same transduction objective with comparable efficiency using a four-wave mixing process in which $pairs$ of pump photons are consumed to produce transduced optical photons widely separated in frequency from the pump. We develop this process by considering higher-order analogues of photoelasticity and electrostriction than those used in conventional optomechanics, and examine how the efficiency of this process can be made to exceed conventional optomechanical couplings.
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Submitted 27 September, 2024;
originally announced September 2024.
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Single-photon detectors on arbitrary photonic substrates
Authors:
Max Tao,
Hugo Larocque,
Samuel Gyger,
Marco Colangelo,
Owen Medeiros,
Ian Christen,
Hamed Sattari,
Gregory Choong,
Yves Petremand,
Ivan Prieto,
Yang Yu,
Stephan Steinhauer,
Gerald L. Leake,
Daniel J. Coleman,
Amir H. Ghadimi,
Michael L. Fanto,
Val Zwiller,
Dirk Englund,
Carlos Errando-Herranz
Abstract:
Detecting non-classical light is a central requirement for photonics-based quantum technologies. Unrivaled high efficiencies and low dark counts have positioned superconducting nanowire single photon detectors (SNSPDs) as the leading detector technology for fiber and integrated photonic applications. However, a central challenge lies in their integration within photonic integrated circuits regardl…
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Detecting non-classical light is a central requirement for photonics-based quantum technologies. Unrivaled high efficiencies and low dark counts have positioned superconducting nanowire single photon detectors (SNSPDs) as the leading detector technology for fiber and integrated photonic applications. However, a central challenge lies in their integration within photonic integrated circuits regardless of material platform or surface topography. Here, we introduce a method based on transfer printing that overcomes these constraints and allows for the integration of SNSPDs onto arbitrary photonic substrates. We prove this by integrating SNSPDs and showing through-waveguide single-photon detection in commercially manufactured silicon and lithium niobate on insulator integrated photonic circuits. Our method eliminates bottlenecks to the integration of high-quality single-photon detectors, turning them into a versatile and accessible building block for scalable quantum information processing.
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Submitted 12 September, 2024;
originally announced September 2024.
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Tunable quantum emitters on large-scale foundry silicon photonics
Authors:
Hugo Larocque,
Mustafa Atabey Buyukkaya,
Carlos Errando-Herranz,
Samuel Harper,
Jacques Carolan,
Chang-Min Lee,
Christopher J. K. Richardson,
Gerald L. Leake,
Daniel J. Coleman,
Michael L. Fanto,
Edo Waks,
Dirk Englund
Abstract:
Controlling large-scale many-body quantum systems at the level of single photons and single atomic systems is a central goal in quantum information science and technology. Intensive research and development has propelled foundry-based silicon-on-insulator photonic integrated circuits to a leading platform for large-scale optical control with individual mode programmability. However, integrating at…
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Controlling large-scale many-body quantum systems at the level of single photons and single atomic systems is a central goal in quantum information science and technology. Intensive research and development has propelled foundry-based silicon-on-insulator photonic integrated circuits to a leading platform for large-scale optical control with individual mode programmability. However, integrating atomic quantum systems with single-emitter tunability remains an open challenge. Here, we overcome this barrier through the hybrid integration of multiple InAs/InP microchiplets containing high-brightness infrared semiconductor quantum dot single photon emitters into advanced silicon-on-insulator photonic integrated circuits fabricated in a 300~mm foundry process. With this platform, we achieve single photon emission via resonance fluorescence and scalable emission wavelength tunability through an electrically controlled non-volatile memory. The combined control of photonic and quantum systems opens the door to programmable quantum information processors manufactured in leading semiconductor foundries.
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Submitted 29 June, 2023; v1 submitted 10 June, 2023;
originally announced June 2023.
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A full degree-of-freedom photonic crystal spatial light modulator
Authors:
Christopher L. Panuski,
Ian R. Christen,
Momchil Minkov,
Cole J. Brabec,
Sivan Trajtenberg-Mills,
Alexander D. Griffiths,
Jonathan J. D. McKendry,
Gerald L. Leake,
Daniel J. Coleman,
Cung Tran,
Jeffrey St Louis,
John Mucci,
Cameron Horvath,
Jocelyn N. Westwood-Bachman,
Stefan F. Preble,
Martin D. Dawson,
Michael J. Strain,
Michael L. Fanto,
Dirk R. Englund
Abstract:
Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-f…
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Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-finesse microcavities through inverse design, (ii) scalable fabrication by optimized, 300 mm full-wafer processing, (iii) picometer-precision resonance alignment using automated, closed-loop "holographic trimming", and (iv) out-of-plane cavity control via a high-speed micro-LED array. Combining each, we demonstrate near-complete spatiotemporal control of a 64-resonator, two-dimensional SLM with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space- and time-bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.
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Submitted 21 April, 2022;
originally announced April 2022.
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Quantifying Tripartite Spatial and Energy-Time Entanglement in Nonlinear Optics
Authors:
James Schneeloch,
Richard J. Birrittella,
Christopher C. Tison,
Gregory A. Howland,
Michael L. Fanto,
Paul M. Alsing
Abstract:
In this work, we provide a means to quantify genuine tripartite entanglement in arbitrary (pure and mixed) continuous-variable states as measured by the Tripartite Entanglement of formation -- a resource-based measure quantifying genuine multi-partite entanglement in units of elementary Greenberger-Horne-Zeilinger (GHZ) states called gebits. Furthermore, we predict its effectiveness in quantifying…
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In this work, we provide a means to quantify genuine tripartite entanglement in arbitrary (pure and mixed) continuous-variable states as measured by the Tripartite Entanglement of formation -- a resource-based measure quantifying genuine multi-partite entanglement in units of elementary Greenberger-Horne-Zeilinger (GHZ) states called gebits. Furthermore, we predict its effectiveness in quantifying the tripartite spatial and energy-time entanglement in photon triplets generated in cascaded spontaneous parametric down-conversion (SPDC), and find that ordinary nonlinear optics can be a substantial resource of tripartite entanglement.
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Submitted 27 June, 2022; v1 submitted 13 October, 2021;
originally announced October 2021.
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Two-dimensional extreme skin depth engineering for CMOS photonics
Authors:
Matthew van Niekerk,
Saman Jahani,
Justin Bickford,
Pak Cho,
Stephen Anderson,
Gerald Leake,
Daniel Coleman,
Michael L. Fanto,
Christopher C. Tison,
Gregory A. Howland,
Zubin Jacob,
Stefan F. Preble
Abstract:
Extreme skin depth engineering (e-skid) can be applied to integrated photonics to manipulate the evanescent field of a waveguide. Here we demonstrate that e-skid can be implemented in two directions in order to deterministically engineer the evanescent wave allowing for dense integration with enhanced functionalities. In particular, by increasing the skin depth, we enable the creation of large gap…
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Extreme skin depth engineering (e-skid) can be applied to integrated photonics to manipulate the evanescent field of a waveguide. Here we demonstrate that e-skid can be implemented in two directions in order to deterministically engineer the evanescent wave allowing for dense integration with enhanced functionalities. In particular, by increasing the skin depth, we enable the creation of large gap, bendless directional couplers with large operational bandwidth. Here we experimentally validate two-dimensional e-skid for integrated photonics in a CMOS photonics foundry and demonstrate strong coupling with a gap of 1.44 μm.
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Submitted 9 December, 2020; v1 submitted 28 May, 2020;
originally announced May 2020.
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A scalable Controlled NOT gate for linear optical computing using microring resonators
Authors:
Ryan E. Scott,
Paul M. Alsing,
A. Matthew Smith,
Michael L. Fanto,
Christopher C. Tison,
James Schneeloch,
Edwin E. Hach, III
Abstract:
We propose a scalable version of a KLM CNOT gate based upon integrated waveguide microring resonators (MRR), vs the original KLM-approach using beam splitters (BS). The core element of our CNOT gate is a nonlinear phase-shift gate (NLPSG) using three MRRs, which we examine in detail. We find an expanded parameter space for the NLPSG over that of the conventional version. Whereas in all prior propo…
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We propose a scalable version of a KLM CNOT gate based upon integrated waveguide microring resonators (MRR), vs the original KLM-approach using beam splitters (BS). The core element of our CNOT gate is a nonlinear phase-shift gate (NLPSG) using three MRRs, which we examine in detail. We find an expanded parameter space for the NLPSG over that of the conventional version. Whereas in all prior proposals for bulk optical realizations of the NLPSG the optimal operating point is precisely a single zero dimensional manifold within the parameter space of the device, we find conditions for effective transmission amplitudes which define a set of one dimensional manifolds in the parameters spaces of the MRRs. This allows for an unprecedented level flexibility in operation of the NLPSG that and allows for the fabrication of tunable MRR-based devices with high precision and low loss.
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Submitted 3 April, 2019;
originally announced April 2019.
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Introduction to the Absolute Brightness and Number Statistics in Spontaneous Parametric Down-Conversion
Authors:
James Schneeloch,
Samuel H. Knarr,
Daniela F. Bogorin,
Mackenzie L. Levangie,
Christopher C. Tison,
Rebecca Frank,
Gregory A. Howland,
Michael L. Fanto,
Paul M. Alsing
Abstract:
As a tutorial, we examine the absolute brightness and number statistics of photon pairs generated in Spontaneous Parametric Down-Conversion (SPDC) from first principles. In doing so, we demonstrate how the diverse implementations of SPDC can be understood through a single common framework, and use this to derive straightforward formulas for the biphoton generation rate (pairs per second) in a vari…
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As a tutorial, we examine the absolute brightness and number statistics of photon pairs generated in Spontaneous Parametric Down-Conversion (SPDC) from first principles. In doing so, we demonstrate how the diverse implementations of SPDC can be understood through a single common framework, and use this to derive straightforward formulas for the biphoton generation rate (pairs per second) in a variety of different circumstances. In particular, we consider the common cases of both collimated and focused gaussian pump beams in a bulk nonlinear crystal, as well as in nonlinear waveguides and micro-ring resonators. Furthermore, we examine the number statistics of down-converted light using a non-perturbative approximation (the multi-mode squeezed vacuum), to provide quantitative formulas for the relative likelihood of multi-pair production events, and explore how the quantum state of the pump affects the subsequent statistics of the downconverted light. Following this, we consider the limits of the undepleted pump approximation, and conclude by performing experiments to test the effectiveness of our theoretical predictions for the biphoton generation rate in a variety of different sources.
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Submitted 27 July, 2018;
originally announced July 2018.
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Truly unentangled photon pairs without spectral filtering
Authors:
Z. Vernon,
M. Menotti,
C. C. Tison,
J. A. Steidle,
M. L. Fanto,
P. M. Thomas,
S. F. Preble,
A. M. Smith,
P. M. Alsing,
M. Liscidini,
J. E. Sipe
Abstract:
We demonstrate that an integrated silicon microring resonator is capable of efficiently producing photon pairs that are completely unentangled; such pairs are a key component of heralded single photon sources. A dual-channel interferometric coupling scheme can be used to independently tune the quality factors associated with the pump and signal and idler modes, yielding a biphoton wavefunction wit…
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We demonstrate that an integrated silicon microring resonator is capable of efficiently producing photon pairs that are completely unentangled; such pairs are a key component of heralded single photon sources. A dual-channel interferometric coupling scheme can be used to independently tune the quality factors associated with the pump and signal and idler modes, yielding a biphoton wavefunction with Schmidt number arbitrarily close to unity. This will permit the generation of heralded single photon states with unit purity.
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Submitted 30 March, 2017;
originally announced March 2017.
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On-Chip Quantum Interference from a Single Silicon Ring Resonator Source
Authors:
Stefan F. Preble,
Michael L. Fanto,
Jeffrey A. Steidle,
Christopher C. Tison,
Gregory A. Howland,
Zihao Wang,
Paul M. Alsing
Abstract:
Here we demonstrate quantum interference of photons on a Silicon chip produced from a single ring resonator photon source. The source is seamlessly integrated with a Mach-Zehnder interferometer, which path entangles degenerate bi-photons produced via spontaneous four wave mixing in the Silicon ring resonator. The resulting bi-photon N00N state is controlled by varying the relative phase of the int…
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Here we demonstrate quantum interference of photons on a Silicon chip produced from a single ring resonator photon source. The source is seamlessly integrated with a Mach-Zehnder interferometer, which path entangles degenerate bi-photons produced via spontaneous four wave mixing in the Silicon ring resonator. The resulting bi-photon N00N state is controlled by varying the relative phase of the integrated Mach-Zehnder interferometer, resulting in high two-photon interference visibilities of V~96%. Furthermore, we show that the interference can be produced using pump wavelengths tuned to all of the ring resonances accessible with our tunable lasers (C+L band). This work is a key demonstration towards the simplified integration of multiple photon sources and quantum circuits together on a monolithic chip, in turn, enabling quantum information chips with much greater complexity and functionality.
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Submitted 16 April, 2015;
originally announced April 2015.
