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Yield, noise and timing studies of ALICE ITS3 stitched sensor test structures: the MOST
Authors:
Jory Sonneveld,
René Barthel,
Szymon Bugiel,
Leonardo Cecconi,
João De Melo,
Martin Fransen,
Alessandro Grelli,
Isis Hobus,
Artem Isakov,
Antoine Junique,
Pedro Leitao,
Magnus Mager,
Younes Otarid,
Francesco Piro,
Marcel Rossewij,
Mariia Selina,
Sergei Solokhin,
Walter Snoeys,
Nicolas Tiltmann,
Arseniy Vitkovskiy,
Håkan Wennlöf
Abstract:
In the LHC long shutdown 3, the ALICE experiment upgrades the inner layers of its Inner Tracker System with three layers of wafer-scale stitched sensors bent around the beam pipe. Two stitched sensor evaluation structures, the MOnolithic Stitched Sensor (MOSS) and MOnolithic Stitched Sensor with Timing (MOST) allow the study of yield dependence on circuit density, power supply segmentation, stitch…
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In the LHC long shutdown 3, the ALICE experiment upgrades the inner layers of its Inner Tracker System with three layers of wafer-scale stitched sensors bent around the beam pipe. Two stitched sensor evaluation structures, the MOnolithic Stitched Sensor (MOSS) and MOnolithic Stitched Sensor with Timing (MOST) allow the study of yield dependence on circuit density, power supply segmentation, stitching demonstration for power and data transmission, performance dependence on reverse bias, charge collection performance, parameter uniformity across the chip, and performance of wafer-scale data transmission.
The MOST measures 25.9 cm x 0.25 cm, has more than 900,000 pixels of 18x18 $μ$m$^2$ and emphasizes the validation of pixel circuitry with maximum density, together with a high number of power domains separated by switches allowing to disconnect faulty circuits. It employs 1 Gb/s 26 cm long data transmission using asynchronous, data-driven readout. This readout preserves information on pixel address, time of arrival and time over threshold. In the MOSS, by contrast, regions with different in-pixel densities are implemented to study yield dependence and are read synchronously.
MOST test results validated the concept of power domain switching and the data transmission over 26 cm stitched lines which are to be employed on the full-size, full-functionality ITS3 prototype sensor, MOSAIX. Jitter of this transmission is still under study. This proceeding summarizes the performance of the stitched sensor test structures with emphasis on the MOST.
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Submitted 22 July, 2025;
originally announced July 2025.
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Further Characterisation of Digital Pixel Test Structures Implemented in a 65 nm CMOS Process
Authors:
Gianluca Aglieri Rinella,
Nicole Apadula,
Anton Andronic,
Matias Antonelli,
Mauro Aresti,
Roberto Baccomi,
Pascal Becht,
Stefania Beole,
Marcello Borri,
Justus Braach,
Matthew Daniel Buckland,
Eric Buschmann,
Paolo Camerini,
Francesca Carnesecchi,
Leonardo Cecconi,
Edoardo Charbon,
Giacomo Contin,
Dominik Dannheim,
Joao de Melo,
Wenjing Deng,
Antonello di Mauro,
Jan Hasenbichler,
Hartmut Hillemanns,
Geun Hee Hong,
Artem Isakov
, et al. (33 additional authors not shown)
Abstract:
The next generation of MAPS for future tracking detectors will have to meet stringent requirements placed on them. One such detector is the ALICE ITS3 that aims to be very light at 0.07% X/X$_{0}$ per layer and have a low power consumption of 40 mW/cm$^{2}$ by implementing wafer-scale MAPS bent into cylindrical half layers. To address these challenging requirements, the ALICE ITS3 project, in conj…
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The next generation of MAPS for future tracking detectors will have to meet stringent requirements placed on them. One such detector is the ALICE ITS3 that aims to be very light at 0.07% X/X$_{0}$ per layer and have a low power consumption of 40 mW/cm$^{2}$ by implementing wafer-scale MAPS bent into cylindrical half layers. To address these challenging requirements, the ALICE ITS3 project, in conjunction with the CERN EP R&D on monolithic pixel sensors, proposed the Tower Partners Semiconductor Co. 65 nm CMOS process as the starting point for the sensor. After the initial results confirmed the detection efficiency and radiation hardness, the choice of the technology was solidified by demonstrating the feasibility of operating MAPS in low-power consumption regimes, < 50 mW/cm$^{2}$, while maintaining high-quality performance. This was shown through a detailed characterisation of the Digital Pixel Test Structure (DPTS) prototype exposed to X-rays and ionising beams, and the results are presented in this article. Additionally, the sensor was further investigated through studies of the fake-hit rate, the linearity of the front-end in the range 1.7-28 keV, the performance after ionising irradiation, and the detection efficiency of inclined tracks in the range 0-45$^\circ$.
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Submitted 9 May, 2025;
originally announced May 2025.
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Exploring unique design features of the Monolithic Stitched Sensor with Timing (MOST): yield, powering, timing, and sensor reverse bias
Authors:
Mariia Selina,
R. Barthel,
S. Bugiel,
L. Cecconi,
J. De Melo,
M. Fransen,
A. Grelli,
I. Hobus,
A. Isakov,
A. Junique,
P. Leitao,
M. Mager,
Y. Otarid,
F. Piro,
M. J. Rossewij,
S. Solokhin,
J. Sonneveld,
W. Snoeys,
N. Tiltmann,
A. Vitkovskiy,
H. Wennloef
Abstract:
Monolithic stitched CMOS sensors are explored for the upgrade of Inner Tracking System of the ALICE experiment (ITS3) and the R&D of the CERN Experimental Physics Department. To learn about stitching, two 26 cm long stitched sensors, the Monolithic Stitched Sensor (MOSS), and the Monolithic Stitched Sensor with Timing (MOST), were implemented in the Engineering Round 1 (ER1) in the TPSCo 65nm ISC…
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Monolithic stitched CMOS sensors are explored for the upgrade of Inner Tracking System of the ALICE experiment (ITS3) and the R&D of the CERN Experimental Physics Department. To learn about stitching, two 26 cm long stitched sensors, the Monolithic Stitched Sensor (MOSS), and the Monolithic Stitched Sensor with Timing (MOST), were implemented in the Engineering Round 1 (ER1) in the TPSCo 65nm ISC technology. Contrary to the MOSS, powered by 20 distinct power domains accessible from separate pads, the MOST has one global analog and digital power domain to or from which small fractions of the matrix can be connected or disconnected by conservatively designed power switches to prevent shorts or defects from affecting the full chip. Instead of the synchronous readout in the MOSS, the MOST immediately transfers hit information upon a hit, preserving timing information. The sensor reverse bias is also applied through the bias of the front-end rather than by a reverse substrate bias. This paper presents the first characterization results of the MOST, with the focus on its specific characteristics, including yield analysis, precise timing measurements, and the potential of its alternative biasing approach for improved sensor performance.
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Submitted 18 April, 2025;
originally announced April 2025.
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Testbeam Characterization of a SiGe BiCMOS Monolithic Silicon Pixel Detector with Internal Gain Layer
Authors:
L. Paolozzi,
M. Milanesio,
T. Moretti,
R. Cardella,
T. Kugathasan,
A. Picardi,
M. Elviretti,
H. Rücker,
F. Cadoux,
R. Cardarelli,
L. Cecconi,
S. Débieux,
Y. Favre,
C. A. Fenoglio,
D. Ferrere,
S. Gonzalez-Sevilla,
L. Iodice,
R. Kotitsa,
C. Magliocca,
M. Nessi,
A. Pizarro-Medina,
J. Saidi,
M. Vicente Barreto Pinto,
S. Zambito,
G. Iacobucci
Abstract:
A monolithic silicon pixel ASIC prototype, produced in 2024 as part of the Horizon 2020 MONOLITH ERC Advanced project, was tested with a 120 GeV/c pion beam. The ASIC features a matrix of hexagonal pixels with a 100 μm pitch, read by low-noise, high-speed front-end electronics built using 130 nm SiGe BiCMOS technology. It includes the PicoAD sensor, which employs a continuous, deep PN junction to…
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A monolithic silicon pixel ASIC prototype, produced in 2024 as part of the Horizon 2020 MONOLITH ERC Advanced project, was tested with a 120 GeV/c pion beam. The ASIC features a matrix of hexagonal pixels with a 100 μm pitch, read by low-noise, high-speed front-end electronics built using 130 nm SiGe BiCMOS technology. It includes the PicoAD sensor, which employs a continuous, deep PN junction to generate avalanche gain. Data were taken across power densities from 0.05 to 2.6 W/cm2 and sensor bias voltages from 90 to 180 V. At the highest bias voltage, corresponding to an electron gain of 50, and maximum power density, an efficiency of (99.99 \pm 0.01)% was achieved. The time resolution at this working point was (24.3 \pm 0.2) ps before time-walk correction, improving to (12.1 \pm 0.3) ps after correction.
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Submitted 10 December, 2024;
originally announced December 2024.
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Testbeam results of irradiated SiGe BiCMOS monolithic silicon pixel detector without internal gain layer
Authors:
T. Moretti,
M. Milanesio,
R. Cardella,
T. Kugathasan,
A. Picardi,
I. Semendyaev,
M. Elviretti,
H. Rücker,
K. Nakamura,
Y. Takubo,
M. Togawa,
F. Cadoux,
R. Cardarelli,
L. Cecconi,
S. Débieux,
Y. Favre,
C. A. Fenoglio,
D. Ferrere,
S. Gonzalez-Sevilla,
L. Iodice,
R. Kotitsa,
C. Magliocca,
M. Nessi,
A. Pizarro-Medina,
J. Sabater Iglesias
, et al. (5 additional authors not shown)
Abstract:
Samples of the monolithic silicon pixel ASIC prototype produced in 2022 within the framework of the Horizon 2020 MONOLITH ERC Advanced project were irradiated with 70 MeV protons up to a fluence of 1 x 1016 neq/cm2, and then tested using a beam of 120 GeV/c pions. The ASIC contains a matrix of 100 μm pitch hexagonal pixels, readout out by low noise and very fast frontend electronics produced in a…
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Samples of the monolithic silicon pixel ASIC prototype produced in 2022 within the framework of the Horizon 2020 MONOLITH ERC Advanced project were irradiated with 70 MeV protons up to a fluence of 1 x 1016 neq/cm2, and then tested using a beam of 120 GeV/c pions. The ASIC contains a matrix of 100 μm pitch hexagonal pixels, readout out by low noise and very fast frontend electronics produced in a 130 nm SiGe BiCMOS technology process. The dependence on the proton fluence of the efficiency and the time resolution of this prototype was measured with the frontend electronics operated at a power density between 0.13 and 0.9 W/cm2. The testbeam data show that the detection efficiency of 99.96% measured at sensor bias voltage of 200 V before irradiation becomes 96.2% after a fluence of 1 x 1016 neq/cm2. An increase of the sensor bias voltage to 300 V provides an efficiency to 99.7% at that proton fluence. The timing resolution of 20 ps measured before irradiation rises for a proton fluence of 1 x 1016 neq/cm2 to 53 and 45 ps at HV = 200 and 300 V, respectively.
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Submitted 21 June, 2024; v1 submitted 19 April, 2024;
originally announced April 2024.
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Time Resolution of a SiGe BiCMOS Monolithic Silicon Pixel Detector without Internal Gain Layer with a Femtosecond Laser
Authors:
M. Milanesio,
L. Paolozzi,
T. Moretti,
A. Latshaw,
L. Bonacina,
R. Cardella,
T. Kugathasan,
A. Picardi,
M. Elviretti,
H. Rücker,
R. Cardarelli,
L. Cecconi,
C. A. Fenoglio,
D. Ferrere,
S. Gonzalez-Sevilla,
L. Iodice,
R. Kotitsa,
C. Magliocca,
M. Nessi,
A. Pizarro-Medina,
J. Sabater Iglesias,
I. Semendyaev,
J. Saidi,
M. Vicente Barreto Pinto,
S. Zambito
, et al. (1 additional authors not shown)
Abstract:
The time resolution of the second monolithic silicon pixel prototype produced for the MONOLITH H2020 ERC Advanced project was studied using a femtosecond laser. The ASIC contains a matrix of hexagonal pixels with 100 μm pitch, readout by low-noise and very fast SiGe HBT frontend electronics. Silicon wafers with 50 μm thick epilayer with a resistivity of 350 Ωcm were used to produce a fully deplete…
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The time resolution of the second monolithic silicon pixel prototype produced for the MONOLITH H2020 ERC Advanced project was studied using a femtosecond laser. The ASIC contains a matrix of hexagonal pixels with 100 μm pitch, readout by low-noise and very fast SiGe HBT frontend electronics. Silicon wafers with 50 μm thick epilayer with a resistivity of 350 Ωcm were used to produce a fully depleted sensor. At the highest frontend power density tested of 2.7 W/cm2, the time resolution with the femtosecond laser pulses was found to be 45 ps for signals generated by 1200 electrons, and 3 ps in the case of 11k electrons, which corresponds approximately to 0.4 and 3.5 times the most probable value of the charge generated by a minimum-ionizing particle. The results were compared with testbeam data taken with the same prototype to evaluate the time jitter produced by the fluctuations of the charge collection.
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Submitted 11 February, 2024; v1 submitted 2 January, 2024;
originally announced January 2024.
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Digital Pixel Test Structures implemented in a 65 nm CMOS process
Authors:
Gianluca Aglieri Rinella,
Anton Andronic,
Matias Antonelli,
Mauro Aresti,
Roberto Baccomi,
Pascal Becht,
Stefania Beole,
Justus Braach,
Matthew Daniel Buckland,
Eric Buschmann,
Paolo Camerini,
Francesca Carnesecchi,
Leonardo Cecconi,
Edoardo Charbon,
Giacomo Contin,
Dominik Dannheim,
Joao de Melo,
Wenjing Deng,
Antonello di Mauro,
Jan Hasenbichler,
Hartmut Hillemanns,
Geun Hee Hong,
Artem Isakov,
Antoine Junique,
Alex Kluge
, et al. (27 additional authors not shown)
Abstract:
The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20 to 40 um and bent to form truly cylindrical half barrels. Among the…
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The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20 to 40 um and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article.
The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at +20 C and a detection efficiency of 99% for a DPTS irradiated with a dose of $10^{15}$ 1 MeV n$_{\mathrm{eq}}/$cm$^2$. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels.
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Submitted 10 July, 2023; v1 submitted 16 December, 2022;
originally announced December 2022.
