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Transmission measurement at 10.6 microns of Te2As3Se5 rib-waveguides on As2S3 substrate
Abstract: The feasibility of chalcogenide rib waveguides working at lambda = 10.6 microns has been demonstrated. The waveguides comprised a several microns thick Te2As3Se5 film deposited by thermal evaporation on a polished As2S3 glass substrate and further etched by physical etching in Ar or CF4/O2 atmosphere. Output images at 10.6 microns and some propagation losses roughly estimated at 10dB/cm proved t… ▽ More
Submitted 3 May, 2007; originally announced May 2007.
Comments: The following article appeared in Vigreux-Bercovici et al., Appl. Phys. Lett. 90, 011110 (2007) and may be found at http://link.aip.org/link/?apl/90/011110
Journal ref: Appl. Phys. Lett. 90, 011110 (2007)