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Fabrication Optimization of van der Waals Metasurfaces: Inverse Patterning Boosts Resonance Quality Factor
Authors:
Jonas Biechteler,
Connor Heimig,
Thomas Weber,
Dmytro Gryb,
Luca Sortino,
Stefan A. Maier,
Leonardo de S. Menezes,
Andreas Tittl
Abstract:
Van der Waals (vdW) materials have garnered growing interest for use as nanophotonic building blocks that offer precise control over light-matter interaction at the nanoscale, such as optical metasurfaces hosting sharp quasi-bound states in the continuum resonances. However, traditional fabrication strategies often rely on lift-off processes, which inherently introduce imperfections in resonator s…
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Van der Waals (vdW) materials have garnered growing interest for use as nanophotonic building blocks that offer precise control over light-matter interaction at the nanoscale, such as optical metasurfaces hosting sharp quasi-bound states in the continuum resonances. However, traditional fabrication strategies often rely on lift-off processes, which inherently introduce imperfections in resonator shape and size distribution, ultimately limiting the resonance performance. Here, an optimized fabrication approach for vdW-metasurfaces is presented that implements inverse patterning of the etching mask, resulting in increased resonator quality solely limited by the resolution of the electron beam lithography resist and etching. Applying this inverse fabrication technique on hexagonal boron nitride (hBN), quality (Q) factors exceeding $10^3$ in the visible spectral range were demonstrated, significantly surpassing previous results shown by lift-off fabricated structures. Additionally, the platforms potential as a biosensor was displayed, achieving competitive sensitivity and figure of merit of 220 in a refractive index sensing experiment. The inverse technique was applied to create chiral metasurfaces from hBN, using a two-height resonator geometry to achieve up to 50 % transmittance selectivity. This inverse lithography technique paves the way towards high-performances vdW-devices with high-Q resonances, establishing hBN as a cornerstone for next-generation nanophotonic and optoelectronic devices.
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Submitted 21 March, 2025;
originally announced March 2025.
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Spatially Encoded Polaritonic Ultra-Strong Coupling in Gradient Metasurfaces with Epsilon-Near-Zero Modes
Authors:
Enrico Bau,
Andreas Aigner,
Jonas Biechteler,
Connor Heimig,
Thorsten Goelz,
Stefan A. Maier,
Andreas Tittl
Abstract:
Ultra-strong coupling (USC) is a light-matter interaction regime characterized by coupling strengths that substantially exceed the threshold for strong coupling. It gives rise to novel physical phenomena, such as efficient single-photon coupling and quantum gates, with applications in quantum sensing, nonlinear optics, and low-threshold lasing. Although early demonstrations in plasmonic systems ha…
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Ultra-strong coupling (USC) is a light-matter interaction regime characterized by coupling strengths that substantially exceed the threshold for strong coupling. It gives rise to novel physical phenomena, such as efficient single-photon coupling and quantum gates, with applications in quantum sensing, nonlinear optics, and low-threshold lasing. Although early demonstrations in plasmonic systems have been realized, achieving USC in dielectric nanophotonic platforms, which offer lower losses and high Q-factors, remains challenging due to typically low mode overlap between the photonic field and the material resonance. Here, we demonstrate ultra-strong coupling to an epsilon-near-zero (ENZ) mode in an ultra-thin SiO$_2$ layer. Our approach leverages a dielectric dual-gradient metasurface supporting quasi-bound-states-in-the-continuum (qBIC) consisting of two tapered bars in each unit cell that generate strong out-of-plane electric fields which overlap exceptionally well with those of the ENZ mode. Using dual gradients to encode both the spectral and coupling parameter space, we track the anticrossing behaviour of this coupled system with high experimental precision, revealing a mode splitting equivalent to 19% of the ENZ mode energy; a four-to-five-fold increase compared to previous approaches. Furthermore, varying the position of the SiO$_2$ layer allows for deliberate control of the mode overlap and the coupling between the qBIC and either the ENZ mode or the transverse optical (TO) phonon can be selectively tuned. This allows us to experimentally create an USC three-resonator system, opening new possibilities for compact and scalable polaritonic devices for sensing and nonlinear optics.
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Submitted 19 February, 2025;
originally announced February 2025.
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Interface second harmonic generation enhancement in hetero-bilayer van der Waals nanoantennas
Authors:
Andrea Tognazzi,
Paolo Franceschini,
Jonas Biechteler,
Enrico Baù,
Alfonso Carmelo Cino,
Andreas Tittl,
Costantino De Angelis,
Luca Sortino
Abstract:
Layered van der Waals (vdW) materials have emerged as a promising platform for nanophotonics due to large refractive indexes and giant optical anisotropy. Unlike conventional dielectrics and semiconductors, the absence of covalent bonds between layers allows for novel degrees of freedom in designing optically resonant nanophotonic structures down to the atomic scale, from the precise stacking of v…
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Layered van der Waals (vdW) materials have emerged as a promising platform for nanophotonics due to large refractive indexes and giant optical anisotropy. Unlike conventional dielectrics and semiconductors, the absence of covalent bonds between layers allows for novel degrees of freedom in designing optically resonant nanophotonic structures down to the atomic scale, from the precise stacking of vertical heterostructures to controlling the twist angle between crystallographic axes. Specifically, while transition metal dichalcogenides monolayers exhibit giant second order nonlinear responses, their bulk counterparts with 2H stacking have zero second order response. In this work, we show second harmonic generation (SHG) arising from the interface of WS$_2$/MoS$_2$ hetero-bilayer thin films with an additional SHG enhancement in nanostructured optical antennas mediated by both the excitonic resonances and the anapole condition. When both conditions are met, we observe up to $10^2$ SHG signal enhancement. Our results highlights vdW materials as a platform for designing unique multilayer optical nanostructures and metamaterial, paving the way for advanced applications in nanophotonics and nonlinear optics.
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Submitted 9 November, 2024;
originally announced November 2024.
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Chiral Nonlinear Polaritonics with van der Waals Metasurfaces
Authors:
Connor Heimig,
Alexander A. Antonov,
Dmytro Gryb,
Thomas Possmayer,
Thomas Weber,
Michael Hirler,
Jonas Biechteler,
Luca Sortino,
Leonardo de S. Menezes,
Stefan A. Maier,
Maxim V. Gorkunov,
Yuri Kivshar,
Andreas Tittl
Abstract:
In the strong-coupling regime, the interaction between light and matter reaches a hybridization state where the photonic and material components become inseparably linked. Using tailored states of light to break symmetries in such systems can underpin the development of novel non-equilibrium quantum materials. Chiral optical cavities offer a promising way for this, enabling either temporal or spat…
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In the strong-coupling regime, the interaction between light and matter reaches a hybridization state where the photonic and material components become inseparably linked. Using tailored states of light to break symmetries in such systems can underpin the development of novel non-equilibrium quantum materials. Chiral optical cavities offer a promising way for this, enabling either temporal or spatial symmetry-breaking, both of which are unachievable with conventional mirror cavities. For spatial symmetry-breaking a cavity needs to discriminate the handedness of circularly polarized light, a functionality that can only be achieved with metamaterials. Here, we suggest and demonstrate experimentally a chiral transition metal dichalcogenide (TMDC) metasurface with broken out-of-plane symmetry, allowing for a selective formation of self-hybridized exciton-polaritons with specific chirality. Our metasurface cavity maintains maximum chirality for oblique incidence up to 20°, significantly outperforming all previously known designs, thereby turning the angle of incidence from a constraint to a new degree of freedom for sub-nanometer precise control of resonance wavelengths. Moreover, we study the chiral strong-coupling regime in nonlinear experiments and show the polariton-driven nature of chiral third-harmonic generation. Our results demonstrate a clear pathway towards novel quantum material engineering with implications in a wide range of photonics research, such as superconductivity and valleytronics.
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Submitted 14 November, 2024; v1 submitted 24 October, 2024;
originally announced October 2024.
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Van der Waals heterostructure metasurfaces: atomic-layer assembly of ultrathin optical cavities
Authors:
Luca Sortino,
Jonas Biechteler,
Lucas Lafeta,
Lucca Kühner,
Achim Hartschuh,
Leonardo de S. Menezes,
Stefan A. Maier,
Andreas Tittl
Abstract:
Photonics has been revolutionized by breakthroughs in optical metasurfaces and layered two-dimensional materials. Yet, integrating these two fields in a singular system has remained challenging. Here, we introduce the concept of van der Waals (vdW) heterostructure metasurfaces, where ultrathin multilayer vdW material stacks are shaped into precisely engineered resonant nanostructures for boosting…
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Photonics has been revolutionized by breakthroughs in optical metasurfaces and layered two-dimensional materials. Yet, integrating these two fields in a singular system has remained challenging. Here, we introduce the concept of van der Waals (vdW) heterostructure metasurfaces, where ultrathin multilayer vdW material stacks are shaped into precisely engineered resonant nanostructures for boosting light-matter interactions. By leveraging quasi-bound states in the continuum to create intrinsic cavities from WS$_2$ monolayers encapsulated in hexagonal boron nitride, we observe room-temperature strong coupling and polaritonic luminescence, which further unveils a saturation of the strong-coupling regime at ultralow fluences <1 nJ/cm2, more than three orders of magnitude smaller than in previous 2D-cavity systems. Our approach, seamlessly merging metasurfaces and vdW materials, unlocks new avenues for ultrathin optical devices with atomic-scale precision and control.
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Submitted 23 July, 2024;
originally announced July 2024.
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Optically addressable spin defects coupled to bound states in the continuum metasurfaces
Authors:
Luca Sortino,
Angus Gale,
Lucca Kühner,
Chi Li,
Jonas Biechteler,
Fedja J. Wendisch,
Mehran Kianinia,
Haoran Ren,
Milos Toth,
Stefan A. Maier,
Igor Aharonovich,
Andreas Tittl
Abstract:
Van der Waals (vdW) materials, including hexagonal boron nitride (hBN), are layered crystalline solids with appealing properties for investigating light-matter interactions at the nanoscale. hBN has emerged as a versatile building block for nanophotonic structures, and the recent identification of native optically addressable spin defects has opened up exciting possibilities in quantum technologie…
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Van der Waals (vdW) materials, including hexagonal boron nitride (hBN), are layered crystalline solids with appealing properties for investigating light-matter interactions at the nanoscale. hBN has emerged as a versatile building block for nanophotonic structures, and the recent identification of native optically addressable spin defects has opened up exciting possibilities in quantum technologies. However, these defects exhibit relatively low quantum efficiencies and a broad emission spectrum, limiting potential applications. Optical metasurfaces present a novel approach to boost light emission efficiency, offering remarkable control over light-matter coupling at the sub-wavelength regime. Here, we propose and realise a monolithic scalable integration between intrinsic spin defects in hBN metasurfaces and high quality (Q) factor resonances leveraging quasi-bound states in the continuum (qBICs). Coupling between spin defect ensembles and qBIC resonances delivers a 25-fold increase in photoluminescence intensity, accompanied by spectral narrowing to below 4 nm linewidth facilitated by Q factors exceeding $10^2$. Our findings demonstrate a new class of spin based metasurfaces and pave the way towards vdW-based nanophotonic devices with enhanced efficiency and sensitivity for quantum applications in imaging, sensing, and light emission.
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Submitted 6 March, 2024; v1 submitted 9 June, 2023;
originally announced June 2023.