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Spatially-Modulated Silicon Interface Energetics via Hydrogen Plasma-Assisted Atomic Layer Deposition of Ultrathin Alumina
Authors:
Alex Henning,
Johannes D. Bartl,
Lukas Wolz,
Maximilian Christis,
Felix Rauh,
Michele Bissolo,
Theresa Grünleitner,
Johanna Eichhorn,
Patrick Zeller,
Matteo Amati,
Luca Gregoratti,
Jonathan J. Finley,
Bernhard Rieger,
Martin Stutzmann,
Ian D. Sharp
Abstract:
Atomic layer deposition (ALD) is a key technique for the continued scaling of semiconductor devices, which increasingly relies on reproducible and scalable processes for interface manipulation of 3D structured surfaces on the atomic scale. While ALD allows the synthesis of conformal films at low temperature with utmost control over the thickness, atomically-defined closed coatings and surface modi…
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Atomic layer deposition (ALD) is a key technique for the continued scaling of semiconductor devices, which increasingly relies on reproducible and scalable processes for interface manipulation of 3D structured surfaces on the atomic scale. While ALD allows the synthesis of conformal films at low temperature with utmost control over the thickness, atomically-defined closed coatings and surface modifications are still extremely difficult to achieve because of three-dimensional growth during nucleation. Here, we present a route towards sub-nanometer thin and continuous aluminum oxide (AlOx) coatings on silicon (Si) substrates for the spatial control of the surface charge density and interface energetics. We use trimethylaluminum (TMA) in combination with remote hydrogen plasma instead of a gas-phase oxidant for the transformation of silicon oxide into alumina (AlOx). During the initial ALD cycles, TMA reacts with the surface oxide (SiO2) on silicon until there is a saturation of bindings sites, after which the oxygen from the underlying surface oxide is consumed, thereby transforming the silicon oxide into Si capped with AlOx. Depending on the number of ALD cycles, the SiO2 can be partially or fully transformed, which we exploit to create sub-nanometer thin and continuous AlOx layers deposited in selected regions defined by lithographic patterning. The resulting patterned surfaces are characterized by lateral AlOx/SiO2 interfaces possessing step heights as small as 0.3 nm and surface potential steps in excess of 0.4 V. In addition, the introduction of fixed negative charges of $9 \times 10^{12}$ cm$^{-2}$ enables modulation of the surface band bending, which is relevant to the field-effect passivation of Si and low-impedance charge transfer across contact interfaces.
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Submitted 24 September, 2022; v1 submitted 29 October, 2021;
originally announced November 2021.
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Near ambient pressure photoelectron spectro-microscopy: from gas-solid interface to operando devices
Authors:
Matteo Amati,
Luca Gregoratti,
Patrick Zeller,
Mark Greiner,
Mattia Scardamaglia,
Benjamin Junker,
Tamara Ruß,
Udo Weimar,
Nicolae Barsan,
Marco Favaro,
Abdulaziz Alharbi,
Ingvild J. T. Jensen,
Ayaz Ali,
Branson D. Belle
Abstract:
Near Ambient Pressure Scanning Photoelectron Microscopy adds to the widely used photoemission spectroscopy and its chemically selective capability two key features: (i) the possibility to chemically analyse samples in a more realistic environmental, gas pressure condition, and (ii) the capability to investigate a system at the relevant spatial scale. To achieve these goals the approach developed a…
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Near Ambient Pressure Scanning Photoelectron Microscopy adds to the widely used photoemission spectroscopy and its chemically selective capability two key features: (i) the possibility to chemically analyse samples in a more realistic environmental, gas pressure condition, and (ii) the capability to investigate a system at the relevant spatial scale. To achieve these goals the approach developed at the ESCA Microscopy beamline at the Elettra Synchrotron facility combines the submicron lateral resolution of a Scanning Photoelectron Microscope with a custom designed Near Ambient Pressure Cell where a gas pressure up to 0.1 mbar is confined inside it around the sample. In this manuscript a review of experiments performed with this unique setup will be presented to illustrate its potentiality in both fundamental and applicative research such as the oxidation reactivity and gas sensitivity of metal oxides and semiconductors. In particular the capability to do operando experiment with this setup opens the possibility to perform investigations with active devices to properly address the real nature of the studied systems, because it can yield to more conclusive results when microscopy and spectroscopy are simultaneously combined in a single technique.
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Submitted 16 April, 2021;
originally announced April 2021.
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Focused Electron and X-ray Beam Crosslinking in Liquids for Nanoscale Hydrogels 3D Printing and Encapsulation
Authors:
Tanya Gupta,
Evgheni Strelcov,
Glenn Holland,
Joshua Schumacher,
Yang Yang,
Mandy Esch,
Vladimir Aksyuk,
Patrick Zeller,
Matteo Amati,
Luca Gregoratti,
Andrei Kolmakov
Abstract:
Additive fabrication of biocompatible 3D structures out of liquid hydrogel solutions has become pivotal technology for tissue engineering, soft robotics, biosensing, drug delivery, etc. Electron and X-ray lithography are well suited to pattern nanoscopic features out of dry polymers, however, the direct additive manufacturing in hydrogel solutions with these powerful tools is hard to implement due…
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Additive fabrication of biocompatible 3D structures out of liquid hydrogel solutions has become pivotal technology for tissue engineering, soft robotics, biosensing, drug delivery, etc. Electron and X-ray lithography are well suited to pattern nanoscopic features out of dry polymers, however, the direct additive manufacturing in hydrogel solutions with these powerful tools is hard to implement due to vacuum incompatibility of hydrated samples. In this work, we resolve this principal impediment and demonstrate a technique for in-liquid hydrogel 3D-sculpturing separating high vacuum instrumentation and volatile sample with ultrathin molecularly impermeable membranes transparent to low-energy electrons and soft X-rays. Using either scanning focused electron or synchrotron soft X-ray beams, the principle of the technique, particularities of the in-liquid crosslinking mechanism and factors affecting the ultimate gel feature size are described and validated through the comparison of experiments and simulations. The potential of this technique is demonstrated on a few practical examples such as encapsulation of nanoparticles and live-cell as well as fabrication of mesoscopic 3D-hydrogel structures via modulation of the beam energy
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Submitted 2 April, 2019;
originally announced April 2019.
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Ambient-Pressure X-ray Photoelectron Spectroscopy through Electron Transparent Graphene Membranes
Authors:
Jurgen Kraus,
Robert Reichelt,
Sebastian Gunther,
Luca Gregoratti,
Matteo Amati,
Maya Kiskinova,
Alexander Yulaev,
Ivan Vlassiouk,
Andrei Kolmakov
Abstract:
Photoelectron spectroscopy (PES) and microscopy are highly demanded for exploring morphologically complex solid-gas and solid-liquid interfaces under realistic conditions, but the very small electron mean free path inside the dense media imposes serious experimental challenges. Currently, near ambient pressure PES is conducted using sophisticated and expensive electron energy analyzers coupled wit…
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Photoelectron spectroscopy (PES) and microscopy are highly demanded for exploring morphologically complex solid-gas and solid-liquid interfaces under realistic conditions, but the very small electron mean free path inside the dense media imposes serious experimental challenges. Currently, near ambient pressure PES is conducted using sophisticated and expensive electron energy analyzers coupled with differentially pumped electron lenses. An alternative economical approach proposed in this report uses ultrathin graphene membranes to isolate the ambient sample environment from the PES detection system. We demonstrate that the graphene membrane separating windows are both mechanically robust and sufficiently transparent for electrons in a wide energy range to allow PES of liquid and gaseous water. The reported proof-of-principle experiments also open a principal possibility to probe vacuum-incompatible toxic or reactive samples enclosed inside the hermetic environmental cells.
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Submitted 15 May, 2014; v1 submitted 14 May, 2014;
originally announced May 2014.
