Performance of Superconducting Resonators Suspended on SiN Membranes
Authors:
Trevor Chistolini,
Kyunghoon Lee,
Archan Banerjee,
Mohammed Alghadeer,
Christian Jünger,
M. Virginia P. Altoé,
Chengyu Song,
Sudi Chen,
Feng Wang,
David I. Santiago,
Irfan Siddiqi
Abstract:
Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using superconducting circuits, there has been less investigation into maximum membrane aspect ratios and achievable suspended device quality, metrics important to establis…
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Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using superconducting circuits, there has been less investigation into maximum membrane aspect ratios and achievable suspended device quality, metrics important to establish the applicable scope of the technique. Here, we investigate these metrics by fabricating superconducting coplanar waveguide resonators entirely atop thin ($\sim$110 nm) SiN membranes, where the membrane's shortest length to thickness yields an aspect ratio of approximately $7.4 \times 10^3$. We compare these membrane resonators to on-substrate resonators on the same chip, finding similar internal quality factors $\sim$$10^5$ at single photon levels. Furthermore, we confirm that these membranes do not adversely affect resonator thermalization and conduct further materials characterization. By achieving high quality superconducting circuit devices fully suspended on thin SiN membranes, our results help expand the technique's scope to potential uses including incorporating higher aspect ratio membranes for device suspension and creating larger footprint, high impedance, and high quality devices.
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Submitted 20 January, 2025; v1 submitted 2 May, 2024;
originally announced May 2024.
Effects of Laser-Annealing on Fixed-Frequency Superconducting Qubits
Authors:
Hyunseong Kim,
Christian Jünger,
Alexis Morvan,
Edward S. Barnard,
William P. Livingston,
M. Virginia P. Altoé,
Yosep Kim,
Chengyu Song,
Larry Chen,
John Mark Kreikebaum,
D. Frank Ogletree,
David I. Santiago,
Irfan Siddiqi
Abstract:
As superconducting quantum processors increase in complexity, techniques to overcome constraints on frequency crowding are needed. The recently developed method of laser-annealing provides an effective post-fabrication method to adjust the frequency of superconducting qubits. Here, we present an automated laser-annealing apparatus based on conventional microscopy components and demonstrate preserv…
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As superconducting quantum processors increase in complexity, techniques to overcome constraints on frequency crowding are needed. The recently developed method of laser-annealing provides an effective post-fabrication method to adjust the frequency of superconducting qubits. Here, we present an automated laser-annealing apparatus based on conventional microscopy components and demonstrate preservation of highly coherent transmons. In one case, we observe a two-fold increase in coherence after laser-annealing and perform noise spectroscopy on this qubit to investigate the change in defect features, in particular two-level system defects. Finally, we present a local heating model as well as demonstrate aging stability for laser-annealing on the wafer scale. Our work constitutes an important first step towards both understanding the underlying physical mechanism and scaling up laser-annealing of superconducting qubits.
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Submitted 7 June, 2022;
originally announced June 2022.
