Showing 1–1 of 1 results for author: Afridi, K K

Beam power scale-up in MEMS based multi-beam ion accelerators

Authors: Q. Ji, K. K. Afridi, T. Bauer, G. Giesbrecht, Y. Hou, A. Lal, D. Ni, A. Persaud, Z. Qin, P. Seidl, S. Sinha, T. Schenkel

Abstract: We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to ach… ▽ More We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing. △ Less

Submitted 21 May, 2021; originally announced May 2021.

Journal ref: Review of Scientific Instruments 92, 103301 (2021)