Showing 1–4 of 4 results for author: Matto, L

50 GHz Piezoelectric Acoustic Filter

Authors: Omar Barrera, Jack Kramer, Lezli Matto, Vakhtang Chulukhadze, Sinwoo Cho, Michael Liao, Mark S. Goorsky, Ruochen Lu

Abstract: This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in sequence, thereby allowing efficient exploitation of high-order modes with high quality factor (Q) and coupling coefficient (k2) in a thicker piezoelectric stack. T… ▽ More This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in sequence, thereby allowing efficient exploitation of high-order modes with high quality factor (Q) and coupling coefficient (k2) in a thicker piezoelectric stack. The demonstrated filter is comprised of twelfth-order symmetric (S12) mode lateral-field-excited bulk acoustic wave resonators (XBARs), built on a 4-layer periodically poled piezoelectric (P3F) 128 Y-cut lithium niobate (LiNbO3) stack. The filter exhibits 3.3 dB insertion loss (IL) and a fractional bandwidth (FBW) of 2.9%. The miniature design, with a footprint of 0.36 mm2, makes it promising for future wireless front-end applications. These results represent the highest frequency acoustic filters reported to date, setting a new benchmark in piezoelectric filter technology. Upon further development, the platform could enable filters further into the FR2 range, essential for next-generation communication systems. △ Less

Submitted 27 June, 2025; originally announced June 2025.

Comments: 8 pages, 10 Figures

Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms

Authors: Omar Barrera, Sinwoo Cho, Kenny Hyunh, Jack Kramer, Michael Liao, Vakhtang Chulukhadze, Lezli Matto, Mark S. Goorsky, Ruochen Lu

Abstract: This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3) substrates with an intermediate amorphous Si (aSi) bonding and sacrificial layer, we demonstrate compact acoustic filters with record-breaking performance beyo… ▽ More This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3) substrates with an intermediate amorphous Si (aSi) bonding and sacrificial layer, we demonstrate compact acoustic filters with record-breaking performance beyond 20 GHz. In the LN-aSi-Al2O3 platform, the third-order ladder filter exhibits low insertion loss (IL) of 1.62 dB and 3-dB fractional bandwidth (FBW) of 19.8% at 22.1 GHz, while in the LN-aSi-Si platform, the filter shows low IL of 2.38 dB and FBW of 18.2% at 23.5 GHz. Material analysis validates the great crystalline quality of the stacks. The high-resolution x-ray diffraction (HRXRD) shows full width half maximum (FWHM) of 53 arcsec for Al2O3 and 206 arcsec for Si, both remarkably low compared to piezoelectric thin films of similar thickness. The reported results bring the state-of-the-art (SoA) of compact acoustic filters to much higher frequencies, and highlight transferred LiNbO3 as promising platforms for mmWave filters in future wireless front ends. △ Less

Submitted 21 November, 2023; originally announced November 2023.

Comments: 4 pages, 8 figures, accepted by IEEE MEMS 2024

Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz

Authors: Jack Kramer, Vakhtang Chulukhadze, Kenny Huynh, Omar Barrera, Michael Liao, Sinwoo Cho, Lezli Matto, Mark S. Goorsky, Ruochen Lu

Abstract: This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high cou… ▽ More This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high coupling at millimeter wave (mm-wave). The device also shows a Q of 159, k2 of 65.06%, and FoM of 103.4 for the 16.99 GHz tone. This result shows promising prospects of P3F LiNbO3 towards mm-wave front-end filters. △ Less

Submitted 11 July, 2023; originally announced July 2023.

Comments: 4 pages, 5 figures, published in 2023 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IEEE IFCS 2023)

Journal ref: 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), Toyama, Japan, 2023

Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW

Authors: Omar Barrera, Sinwoo Cho, Lezli Matto, Jack Kramer, Kenny Huynh, Vakhtang Chulukhadze, Yen-Wei Chang, Mark S. Goorsky, Ruochen Lu

Abstract: This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic resonators in 100 nm 128° Y-cut lithium niobate (LiNbO3) piezoelectric thin film, operating in the first-order antisymmetric (A1) mode. A new film stack, namely tr… ▽ More This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic resonators in 100 nm 128° Y-cut lithium niobate (LiNbO3) piezoelectric thin film, operating in the first-order antisymmetric (A1) mode. A new film stack, namely transferred thin-film LiNbO3 on silicon (Si) substrate with an intermediate amorphous silicon (a-Si) layer, facilitates the record-breaking performance at millimeter-wave (mmWave). The filter features a compact footprint of 0.56 mm2. In this letter, acoustic and EM consideration, along with material characterization with X-ray diffraction and verified with cross-sectional electron microscopy are reported. Upon further development, the reported filter platform can enable various front-end signal-processing functions at mmWave. △ Less

Submitted 10 July, 2023; originally announced July 2023.

Comments: 4 pages, 8 figures, submitted to IEEE JMEMS